Takahiro SHIOZAWA

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Koshi City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method, recording medium and substrate process...
- Patent number 11,848,189
- Issue date Dec 19, 2023
- Tokyo Electron Limited
- Takahiro Shiozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,594,424
- Issue date Feb 28, 2023
- Tokyo Electron Limited
- Takahiro Shiozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment method and thermal treatment apparatus
- Patent number 10,656,526
- Issue date May 19, 2020
- Tokyo Electron Limited
- Yohei Sano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, non-transitory storage medium and heat...
- Patent number 9,558,960
- Issue date Jan 31, 2017
- Tokyo Electron Limited
- Takahiro Shiozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, substrate processing apparatus, and st...
- Patent number 9,552,987
- Issue date Jan 24, 2017
- Tokyo Electron Limited
- Yuichiro Miyata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210249277
- Publication date Aug 12, 2021
- TOKYO ELECTRON LIMITED
- Takahiro SHIOZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, RECORDING MEDIUM AND SUBSTRATE PROCESS...
- Publication number 20210066097
- Publication date Mar 4, 2021
- TOKYO ELECTRON LIMITED
- Takahiro Shiozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD AND THERMAL TREATMENT APPARATUS
- Publication number 20180164689
- Publication date Jun 14, 2018
- TOKYO ELECTRON LIMITED
- Yohei SANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing method, non-transitory storage medium and heat...
- Publication number 20160189974
- Publication date Jun 30, 2016
- TOKYO ELECTRON LIMITED
- Takahiro Shiozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...
- Publication number 20140363976
- Publication date Dec 11, 2014
- TOKYO ELECTRON LIMITED
- Yuichiro MIYATA
- H01 - BASIC ELECTRIC ELEMENTS