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Takahiro TAJIRI
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Fukuoka, JP
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Patents Grants
last 30 patents
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Patent Grant
Method and apparatus for measuring surface properties of polishing pad
Patent number
10,478,936
Issue date
Nov 19, 2019
Ebara Corporation
Hisanori Matsuo
B24 - GRINDING POLISHING
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Patent Grant
Polishing apparatus
Patent number
9,669,515
Issue date
Jun 6, 2017
Ebara Corporation
Hisanori Matsuo
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
METHOD AND APPARATUS FOR MEASURING SURFACE PROPERTIES OF POLISHING PAD
Publication number
20160184960
Publication date
Jun 30, 2016
EBARA CORPORATION
Hisanori MATSUO
G01 - MEASURING TESTING
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Patent Application
POLISHING APPARATUS
Publication number
20150283669
Publication date
Oct 8, 2015
EBARA CORPORATION
Hisanori MATSUO
H01 - BASIC ELECTRIC ELEMENTS