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Plasma processing apparatus
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Patent number 5,766,364
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Issue date Jun 16, 1998
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Matsushita Electric Industrial Co., Ltd.
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Toshimichi Ishida
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Sputtering apparatus and method
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Patent number 5,626,727
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Issue date May 6, 1997
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Matsushita Electric Industrial Co., Ltd.
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Hitoshi Yamanishi
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H01 - BASIC ELECTRIC ELEMENTS
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Sputtering electrode
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Patent number 5,512,156
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Issue date Apr 30, 1996
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Matsushita Electric Industrial Co., Ltd.
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Hitoshi Yamanishi
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...