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Electrostatic chucking mechanism
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Patent number 5,948,165
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Issue date Sep 7, 1999
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Anelva Corporation
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Takahiro Tamura
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Plasma treatment device
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Patent number 5,897,923
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Issue date Apr 27, 1999
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Anelva Corporation
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Takahiro Tamura
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Plasma processing system
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Patent number 5,897,740
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Issue date Apr 27, 1999
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Anelva Corporation
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Takahiro Tamura
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C03 - GLASS MINERAL OR SLAG WOOL
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Thin film deposition apparatus
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Patent number 5,522,936
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Issue date Jun 4, 1996
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Anelva Corporation
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Takahiro Tamura
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...