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Takahiro Togashi
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Kamisato, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method for detecting particles and defects and inspection equipment...
Patent number
RE44977
Issue date
Jul 1, 2014
Hitachi High-Technologies Corporation
Takahiro Togashi
356 - Optics: measuring and testing
Information
Patent Grant
Method for detecting particles and defects and inspection equipment...
Patent number
RE44840
Issue date
Apr 15, 2014
Hitachi High-Technologies Corporation
Takahiro Togashi
356 - Optics: measuring and testing
Information
Patent Grant
Method of apparatus for detecting particles on a specimen
Patent number
8,289,507
Issue date
Oct 16, 2012
Hitachi High-Technologies Corporation
Akira Hamamatsu
G01 - MEASURING TESTING
Information
Patent Grant
Method for detecting particles and defects and inspection equipment...
Patent number
8,094,298
Issue date
Jan 10, 2012
Hitachi High-Technologies Corporation
Takahiro Togashi
G01 - MEASURING TESTING
Information
Patent Grant
Method of apparatus for detecting particles on a specimen
Patent number
7,952,700
Issue date
May 31, 2011
Hitachi High-Technologies Corporation
Akira Hamamatsu
G01 - MEASURING TESTING
Information
Patent Grant
Method of apparatus for detecting particles on a specimen
Patent number
7,817,261
Issue date
Oct 19, 2010
Hitachi High-Technologies Corporation
Akira Hamamatsu
G01 - MEASURING TESTING
Information
Patent Grant
Method for detecting particles and defects and inspection equipment...
Patent number
7,619,729
Issue date
Nov 17, 2009
Hitachi High-Technologies Corporation
Takahiro Togashi
G01 - MEASURING TESTING
Information
Patent Grant
Method for detecting particles and defects and inspection equipment...
Patent number
7,456,948
Issue date
Nov 25, 2008
Hitachi High-Technologies Corporation
Takahiro Togashi
G01 - MEASURING TESTING
Information
Patent Grant
Method of apparatus for detecting particles on a specimen
Patent number
7,369,223
Issue date
May 6, 2008
Hitachi High-Technologies Corporation
Akira Hamamatsu
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF APPARATUS FOR DETECTING PARTICLES ON A SPECIMEN
Publication number
20110228258
Publication date
Sep 22, 2011
Akira Hamamatsu
G01 - MEASURING TESTING
Information
Patent Application
METHOD OF APPARATUS FOR DETECTING PARTICLES ON A SPECIMEN
Publication number
20110032515
Publication date
Feb 10, 2011
Akira Hamamatsu
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR DETECTING PARTICLES AND DEFECTS AND INSPECTION EQUIPMENT...
Publication number
20100020315
Publication date
Jan 28, 2010
Hitachi High-Technologies Corp
Takahiro Togashi
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR DETECTING PARTICLES AND DEFECTS AND INSPECTION EQUIPMENT...
Publication number
20090066941
Publication date
Mar 12, 2009
Hitachi High-Technologies Corporation
Takahiro Togashi
G01 - MEASURING TESTING
Information
Patent Application
Inspection device and inspection method of an object to be inspected
Publication number
20080218751
Publication date
Sep 11, 2008
Hitachi High-Technologies Corporation
Takahiro Togashi
G01 - MEASURING TESTING
Information
Patent Application
Method Of Apparatus For Detecting Particles On A Specimen
Publication number
20080204724
Publication date
Aug 28, 2008
Akira Hamamatsu
G01 - MEASURING TESTING
Information
Patent Application
Method for detecting particles and defects and inspection equipment...
Publication number
20080007725
Publication date
Jan 10, 2008
Hitachi High-Technologies Corporation
Takahiro Togashi
G01 - MEASURING TESTING
Information
Patent Application
Method of apparatus for detecting particles on a specimen
Publication number
20050213086
Publication date
Sep 29, 2005
Akira Hamamatsu
G01 - MEASURING TESTING