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Takahiro Yajimaa
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Souraku-gun, JP
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last 30 patents
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Patent Grant
Apparatus and method for forming a deposited film on a substrate
Patent number
6,436,797
Issue date
Aug 20, 2002
Canon Kabushiki Kaisha
Yasushi Fujioka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...