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Takahiro Yokoyama

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Patents Grantslast 30 patents

  • Information Patent Grant

    Etching method and plasma processing apparatus
    • Patent number 11,710,644
    • Issue date Jul 25, 2023
    • Tokyo Electron Limited
    • Takahiro Yokoyama
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Etching method
    • Patent number 11,615,964
    • Issue date Mar 28, 2023
    • Tokyo Electron Limited
    • Takahiro Yokoyama
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Etching method and plasma processing apparatus
    • Patent number 11,600,501
    • Issue date Mar 7, 2023
    • Tokyo Electron Limited
    • Takahiro Yokoyama
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Etching method
    • Patent number 11,551,937
    • Issue date Jan 10, 2023
    • Tokyo Electron Limited
    • Takahiro Yokoyama
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Etching method and etching apparatus
    • Patent number 11,495,468
    • Issue date Nov 8, 2022
    • Tokyo Electron Limited
    • Takahiro Yokoyama
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Etching method
    • Patent number 11,456,180
    • Issue date Sep 27, 2022
    • Tokyo Electron Limited
    • Takahiro Yokoyama
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Etching method and plasma processing apparatus
    • Patent number 11,417,535
    • Issue date Aug 16, 2022
    • Tokyo Electron Limited
    • Takahiro Yokoyama
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Etching method
    • Patent number 11,417,530
    • Issue date Aug 16, 2022
    • Tokyo Electron Limited
    • Takahiro Yokoyama
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Film forming and process container cleaning method
    • Patent number 11,367,610
    • Issue date Jun 21, 2022
    • Tokyo Electron Limited
    • Yoshihide Kihara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Laser diode and method of manufacturing the same
    • Patent number 8,802,458
    • Issue date Aug 12, 2014
    • Sony Corporation
    • Makoto Nakashima
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Semiconductor laser device
    • Patent number 8,619,829
    • Issue date Dec 31, 2013
    • Sony Corporation
    • Yuta Yoshida
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Laser diode
    • Patent number 8,619,826
    • Issue date Dec 31, 2013
    • Sony Corporation
    • Makoto Nakashima
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Laser diode and method of manufacturing the same
    • Patent number 8,130,804
    • Issue date Mar 6, 2012
    • Sony Corporation
    • Makoto Nakashima
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    ETCHING METHOD, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, ETCH...
    • Publication number 20240162047
    • Publication date May 16, 2024
    • TOKYO ELECTRON LIMITED
    • Takahiro YOKOYAMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD AND PLASMA PROCESSING APPARATUS
    • Publication number 20230207343
    • Publication date Jun 29, 2023
    • TOKYO ELECTRON LIMITED
    • Takahiro YOKOYAMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ETCHING METHOD
    • Publication number 20230197458
    • Publication date Jun 22, 2023
    • TOKYO ELECTRON LIMITED
    • Takahiro YOKOYAMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD AND PLASMA PROCESSING APPARATUS
    • Publication number 20220328323
    • Publication date Oct 13, 2022
    • TOKYO ELECTRON LIMITED
    • Takahiro YOKOYAMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD
    • Publication number 20220199412
    • Publication date Jun 23, 2022
    • TOKYO ELECTRON LIMITED
    • Takahiro YOKOYAMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD
    • Publication number 20220157610
    • Publication date May 19, 2022
    • TOKYO ELECTRON LIMITED
    • Takahiro YOKOYAMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD AND PLASMA PROCESSING APPARATUS
    • Publication number 20220102159
    • Publication date Mar 31, 2022
    • TOKYO ELECTRON LIMITED
    • Takahiro YOKOYAMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    HIGH-THROUGHPUT DRY ETCHING OF SILICON OXIDE AND SILICON NITRIDE MA...
    • Publication number 20210233775
    • Publication date Jul 29, 2021
    • TOKYO ELECTRON LIMITED
    • Du Zhang
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD
    • Publication number 20210143016
    • Publication date May 13, 2021
    • TOKYO ELECTRON LIMITED
    • Takahiro YOKOYAMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD AND PLASMA PROCESSING APPARATUS
    • Publication number 20210143028
    • Publication date May 13, 2021
    • TOKYO ELECTRON LIMITED
    • Takahiro YOKOYAMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ETCHING METHOD AND PLASMA PROCESSING APPARATUS
    • Publication number 20210143017
    • Publication date May 13, 2021
    • TOKYO ELECTRON LIMITED
    • Takahiro YOKOYAMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD AND ETCHING APPARATUS
    • Publication number 20210066089
    • Publication date Mar 4, 2021
    • TOKYO ELECTRON LIMITED
    • Takahiro YOKOYAMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM FORMING METHOD
    • Publication number 20190214246
    • Publication date Jul 11, 2019
    • TOKYO ELECTRON LIMITED
    • Yoshihide KIHARA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING METHOD
    • Publication number 20190198321
    • Publication date Jun 27, 2019
    • TOKYO ELECTRON LIMITED
    • Yoshihide KIHARA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    LASER DIODE AND METHOD OF MANUFACTURING THE SAME
    • Publication number 20120107972
    • Publication date May 3, 2012
    • SONY CORPORATION
    • Makoto Nakashima
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SEMICONDUCTOR LASER DEVICE
    • Publication number 20110002354
    • Publication date Jan 6, 2011
    • SONY CORPORATION
    • Yuta Yoshida
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    LASER DIODE
    • Publication number 20100329295
    • Publication date Dec 30, 2010
    • SONY CORPORATION
    • Makoto Nakashima
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    LASER DIODE AND METHOD OF MANUFACTURING THE SAME
    • Publication number 20100111129
    • Publication date May 6, 2010
    • SONY CORPORATION
    • Makoto Nakashima
    • H01 - BASIC ELECTRIC ELEMENTS