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Takahiro Yokoyama
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Miyagi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Etching method and plasma processing apparatus
Patent number
11,710,644
Issue date
Jul 25, 2023
Tokyo Electron Limited
Takahiro Yokoyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method
Patent number
11,615,964
Issue date
Mar 28, 2023
Tokyo Electron Limited
Takahiro Yokoyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method and plasma processing apparatus
Patent number
11,600,501
Issue date
Mar 7, 2023
Tokyo Electron Limited
Takahiro Yokoyama
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Etching method
Patent number
11,551,937
Issue date
Jan 10, 2023
Tokyo Electron Limited
Takahiro Yokoyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method and etching apparatus
Patent number
11,495,468
Issue date
Nov 8, 2022
Tokyo Electron Limited
Takahiro Yokoyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method
Patent number
11,456,180
Issue date
Sep 27, 2022
Tokyo Electron Limited
Takahiro Yokoyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method and plasma processing apparatus
Patent number
11,417,535
Issue date
Aug 16, 2022
Tokyo Electron Limited
Takahiro Yokoyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching method
Patent number
11,417,530
Issue date
Aug 16, 2022
Tokyo Electron Limited
Takahiro Yokoyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film forming and process container cleaning method
Patent number
11,367,610
Issue date
Jun 21, 2022
Tokyo Electron Limited
Yoshihide Kihara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Laser diode and method of manufacturing the same
Patent number
8,802,458
Issue date
Aug 12, 2014
Sony Corporation
Makoto Nakashima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor laser device
Patent number
8,619,829
Issue date
Dec 31, 2013
Sony Corporation
Yuta Yoshida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser diode
Patent number
8,619,826
Issue date
Dec 31, 2013
Sony Corporation
Makoto Nakashima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser diode and method of manufacturing the same
Patent number
8,130,804
Issue date
Mar 6, 2012
Sony Corporation
Makoto Nakashima
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ETCHING METHOD, PLASMA PROCESSING APPARATUS, AND SUBSTRATE PROCESSI...
Publication number
20240312771
Publication date
Sep 19, 2024
TOKYO ELECTRON LIMITED
Yusuke TAKINO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, ETCH...
Publication number
20240162047
Publication date
May 16, 2024
TOKYO ELECTRON LIMITED
Takahiro YOKOYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20230207343
Publication date
Jun 29, 2023
TOKYO ELECTRON LIMITED
Takahiro YOKOYAMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ETCHING METHOD
Publication number
20230197458
Publication date
Jun 22, 2023
TOKYO ELECTRON LIMITED
Takahiro YOKOYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20220328323
Publication date
Oct 13, 2022
TOKYO ELECTRON LIMITED
Takahiro YOKOYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD
Publication number
20220199412
Publication date
Jun 23, 2022
TOKYO ELECTRON LIMITED
Takahiro YOKOYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD
Publication number
20220157610
Publication date
May 19, 2022
TOKYO ELECTRON LIMITED
Takahiro YOKOYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20220102159
Publication date
Mar 31, 2022
TOKYO ELECTRON LIMITED
Takahiro YOKOYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH-THROUGHPUT DRY ETCHING OF SILICON OXIDE AND SILICON NITRIDE MA...
Publication number
20210233775
Publication date
Jul 29, 2021
TOKYO ELECTRON LIMITED
Du Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD
Publication number
20210143016
Publication date
May 13, 2021
TOKYO ELECTRON LIMITED
Takahiro YOKOYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20210143028
Publication date
May 13, 2021
TOKYO ELECTRON LIMITED
Takahiro YOKOYAMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20210143017
Publication date
May 13, 2021
TOKYO ELECTRON LIMITED
Takahiro YOKOYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND ETCHING APPARATUS
Publication number
20210066089
Publication date
Mar 4, 2021
TOKYO ELECTRON LIMITED
Takahiro YOKOYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMING METHOD
Publication number
20190214246
Publication date
Jul 11, 2019
TOKYO ELECTRON LIMITED
Yoshihide KIHARA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD
Publication number
20190198321
Publication date
Jun 27, 2019
TOKYO ELECTRON LIMITED
Yoshihide KIHARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER DIODE AND METHOD OF MANUFACTURING THE SAME
Publication number
20120107972
Publication date
May 3, 2012
SONY CORPORATION
Makoto Nakashima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR LASER DEVICE
Publication number
20110002354
Publication date
Jan 6, 2011
SONY CORPORATION
Yuta Yoshida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER DIODE
Publication number
20100329295
Publication date
Dec 30, 2010
SONY CORPORATION
Makoto Nakashima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER DIODE AND METHOD OF MANUFACTURING THE SAME
Publication number
20100111129
Publication date
May 6, 2010
SONY CORPORATION
Makoto Nakashima
H01 - BASIC ELECTRIC ELEMENTS