Takahisa Kikuchi

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Saitama-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Exposure method and device manufacturing method, exposure apparatus...
- Patent number 7,817,242
- Issue date Oct 19, 2010
- Nikon Corporation
- Masaharu Kawakubo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method, exposure apparatus and making method of the appara...
- Patent number 6,813,004
- Issue date Nov 2, 2004
- Nikon Corporation
- Takahiro Horikoshi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD AND DEVICE MANUFACTURING METHOD
- Publication number 20090174873
- Publication date Jul 9, 2009
- NIKON CORPORATION
- Takahisa KIKUCHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure method and device manufacturing method, exposure apparatus...
- Publication number 20070109524
- Publication date May 17, 2007
- Masaharu Kawakubo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Evaluation method, position detection method, exposure method and d...
- Publication number 20040126004
- Publication date Jul 1, 2004
- Nikon Corporation
- Takahisa Kikuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Evaluation method, position detection method, exposure method and d...
- Publication number 20020042664
- Publication date Apr 11, 2002
- Nikon Corporation
- Takahisa Kikuchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY