Takahito NAKASHOYA

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Koshi City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,801,537
- Issue date Oct 31, 2023
- Tokyo Electron Limited
- Takahito Nakashoya
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230005763
- Publication date Jan 5, 2023
- TOKYO ELECTRON LIMITED
- Kazuki KOSAI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220362813
- Publication date Nov 17, 2022
- TOKYO ELECTRON LIMITED
- Takahito NAKASHOYA
- B08 - CLEANING