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Takahito Nakayama
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Shizuoka, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Multi-charged-particle-beam writing method, multi-charged-particle-...
Patent number
12,046,447
Issue date
Jul 23, 2024
NuFlare Technology, Inc.
Taku Yamada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
Patent number
11,756,766
Issue date
Sep 12, 2023
NuFlare Technology, Inc.
Takahito Nakayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam writing apparatus and cathode life span prediction me...
Patent number
11,749,491
Issue date
Sep 5, 2023
NuFlare Technology, Inc.
Satoshi Nakahashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam adjustment method, charged particle beam draw...
Patent number
11,658,002
Issue date
May 23, 2023
NuFlare Technology, Inc.
Ryoichi Kakehi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing apparatus, method of adjusting beam i...
Patent number
11,145,483
Issue date
Oct 12, 2021
NuFlare Technology, Inc.
Takahito Nakayama
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
Patent number
11,037,757
Issue date
Jun 15, 2021
NuFlare Technology, Inc.
Takahito Nakayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
Patent number
10,930,469
Issue date
Feb 23, 2021
NuFlare Technology, Inc.
Takahito Nakayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing method and charged particle beam writ...
Patent number
10,755,893
Issue date
Aug 25, 2020
NuFlare Technology, Inc.
Rieko Nishimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
Patent number
10,553,396
Issue date
Feb 4, 2020
NuFlare Technology, Inc.
Takahito Nakayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing apparatus and method for diagnosing f...
Patent number
10,460,902
Issue date
Oct 29, 2019
NuFlare Technology, Inc.
Takahito Nakayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing apparatus, method of adjusting beam i...
Patent number
10,192,712
Issue date
Jan 29, 2019
NuFlare Technology, Inc.
Takahito Nakayama
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Charged particle beam writing apparatus, method of adjusting beam i...
Patent number
9,824,849
Issue date
Nov 21, 2017
NuFlare Technology, Inc.
Takahito Nakayama
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Electron beam writing apparatus and electron beam writing method
Patent number
9,373,424
Issue date
Jun 21, 2016
Nuflare Technology, Inc.
Takanao Touya
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Charged particle beam writing apparatus, method of adjusting beam i...
Patent number
9,236,223
Issue date
Jan 12, 2016
NuFlare Technology, Inc.
Takahito Nakayama
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Electron beam writing apparatus and electron beam writing method
Patent number
8,816,276
Issue date
Aug 26, 2014
Nuflare Technology, Inc.
Takanao Touya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Focusing method of charged particle beam and astigmatism adjusting...
Patent number
8,188,443
Issue date
May 29, 2012
Nuflare Technology, Inc.
Kenji Ohtoshi
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method of acquiring offset deflection amount for shaped beam and li...
Patent number
8,008,631
Issue date
Aug 30, 2011
Nuflare Technology, Inc.
Takahito Nakayama
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
CONTROL METHOD OF WRITING APPARATUS AND WRITING APPARATUS
Publication number
20240297010
Publication date
Sep 5, 2024
NuFlare Technology, Inc.
Eita FUJISAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROL METHOD OF WRITING APPARATUS AND WRITING APPARATUS
Publication number
20230111566
Publication date
Apr 13, 2023
NuFlare Technology, Inc.
Eita FUJISAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING METHOD AND CHARGED PARTICLE BEAM WRIT...
Publication number
20230102923
Publication date
Mar 30, 2023
NuFlare Technology, Inc.
Haruyuki NOMURA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MULTI-CHARGED-PARTICLE-BEAM WRITING METHOD, MULTI-CHARGED-PARTICLE-...
Publication number
20230078311
Publication date
Mar 16, 2023
NuFlare Technology, Inc.
Taku YAMADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
Publication number
20220319807
Publication date
Oct 6, 2022
NuFlare Technology, Inc.
Takahito NAKAYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON BEAM WRITING APPARATUS AND CATHODE LIFE SPAN PREDICTION ME...
Publication number
20220230834
Publication date
Jul 21, 2022
NuFlare Technology, Inc.
Satoshi NAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM ADJUSTMENT METHOD, CHARGED PARTICLE BEAM DRAW...
Publication number
20220068591
Publication date
Mar 3, 2022
NuFlare Technology, Inc.
Ryoichi KAKEHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
Publication number
20200258715
Publication date
Aug 13, 2020
NuFlare Technology, Inc.
Takahito NAKAYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING METHOD AND CHARGED PARTICLE BEAM WRIT...
Publication number
20190237297
Publication date
Aug 1, 2019
NuFlare Technology, Inc.
Rieko NISHIMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
Publication number
20190122858
Publication date
Apr 25, 2019
NuFlare Technology, Inc.
Takahito NAKAYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
Publication number
20190122859
Publication date
Apr 25, 2019
NuFlare Technology, Inc.
Takahito NAKAYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS, METHOD OF ADJUSTING BEAM I...
Publication number
20190115185
Publication date
Apr 18, 2019
NuFlare Technology, Inc.
Takahito NAKAYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND METHOD FOR DIAGNOSING F...
Publication number
20190080877
Publication date
Mar 14, 2019
NuFlare Technology, Inc.
Takahito NAKAYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS, METHOD OF ADJUSTING BEAM I...
Publication number
20180076002
Publication date
Mar 15, 2018
NuFlare Technology, Inc.
Takahito NAKAYAMA
B82 - NANO-TECHNOLOGY
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS, METHOD OF ADJUSTING BEAM I...
Publication number
20160071682
Publication date
Mar 10, 2016
NuFlare Technology, Inc.
Takahito NAKAYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS, METHOD OF ADJUSTING BEAM I...
Publication number
20140203185
Publication date
Jul 24, 2014
NuFlare Technology, Inc.
Takahito NAKAYAMA
B82 - NANO-TECHNOLOGY
Information
Patent Application
SHAPING OFFSET ADJUSTMENT METHOD AND CHARGED PARTICLE BEAM DRAWING...
Publication number
20130256555
Publication date
Oct 3, 2013
NuFlare Technology, Inc.
Takahito NAKAYAMA
B82 - NANO-TECHNOLOGY
Information
Patent Application
ELECTRON BEAM WRITING APPARATUS AND ELECTRON BEAM WRITING METHOD
Publication number
20130214172
Publication date
Aug 22, 2013
NuFlare Technology, Inc.
Takanao Touya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON BEAM WRITING APPARATUS AND ELECTRON BEAM WRITING METHOD
Publication number
20130216953
Publication date
Aug 22, 2013
NuFlare Technology, Inc.
Takanao TOUYA
B82 - NANO-TECHNOLOGY
Information
Patent Application
METHOD OF ACQUIRING OFFSET DEFLECTION AMOUNT FOR SHAPED BEAM AND LI...
Publication number
20100001203
Publication date
Jan 7, 2010
NuFlare Technology, Inc.
Takahito Nakayama
B82 - NANO-TECHNOLOGY
Information
Patent Application
FOCUSING METHOD OF CHARGED PARTICLE BEAM AND ASTIGMATISM ADJUSTING...
Publication number
20080217553
Publication date
Sep 11, 2008
NuFlare Technology, Inc.
Kenji Ohtoshi
B82 - NANO-TECHNOLOGY