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Takahito Nakayama
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Shizuoka, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Multi-charged-particle-beam writing method, multi-charged-particle-...
Patent number
12,046,447
Issue date
Jul 23, 2024
NuFlare Technology, Inc.
Taku Yamada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
Patent number
11,756,766
Issue date
Sep 12, 2023
NuFlare Technology, Inc.
Takahito Nakayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam writing apparatus and cathode life span prediction me...
Patent number
11,749,491
Issue date
Sep 5, 2023
NuFlare Technology, Inc.
Satoshi Nakahashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam adjustment method, charged particle beam draw...
Patent number
11,658,002
Issue date
May 23, 2023
NuFlare Technology, Inc.
Ryoichi Kakehi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing apparatus, method of adjusting beam i...
Patent number
11,145,483
Issue date
Oct 12, 2021
NuFlare Technology, Inc.
Takahito Nakayama
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
Patent number
11,037,757
Issue date
Jun 15, 2021
NuFlare Technology, Inc.
Takahito Nakayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
Patent number
10,930,469
Issue date
Feb 23, 2021
NuFlare Technology, Inc.
Takahito Nakayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing method and charged particle beam writ...
Patent number
10,755,893
Issue date
Aug 25, 2020
NuFlare Technology, Inc.
Rieko Nishimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
Patent number
10,553,396
Issue date
Feb 4, 2020
NuFlare Technology, Inc.
Takahito Nakayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing apparatus and method for diagnosing f...
Patent number
10,460,902
Issue date
Oct 29, 2019
NuFlare Technology, Inc.
Takahito Nakayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing apparatus, method of adjusting beam i...
Patent number
10,192,712
Issue date
Jan 29, 2019
NuFlare Technology, Inc.
Takahito Nakayama
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Charged particle beam writing apparatus, method of adjusting beam i...
Patent number
9,824,849
Issue date
Nov 21, 2017
NuFlare Technology, Inc.
Takahito Nakayama
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Electron beam writing apparatus and electron beam writing method
Patent number
9,373,424
Issue date
Jun 21, 2016
Nuflare Technology, Inc.
Takanao Touya
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Charged particle beam writing apparatus, method of adjusting beam i...
Patent number
9,236,223
Issue date
Jan 12, 2016
NuFlare Technology, Inc.
Takahito Nakayama
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Electron beam writing apparatus and electron beam writing method
Patent number
8,816,276
Issue date
Aug 26, 2014
Nuflare Technology, Inc.
Takanao Touya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Focusing method of charged particle beam and astigmatism adjusting...
Patent number
8,188,443
Issue date
May 29, 2012
Nuflare Technology, Inc.
Kenji Ohtoshi
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method of acquiring offset deflection amount for shaped beam and li...
Patent number
8,008,631
Issue date
Aug 30, 2011
Nuflare Technology, Inc.
Takahito Nakayama
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MULTI-BEAM WRITING METHOD AND MULTI-BEAM WRITING APPARATUS
Publication number
20250118529
Publication date
Apr 10, 2025
NuFlare Technology, Inc.
Haruyuki NOMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROL METHOD OF WRITING APPARATUS AND WRITING APPARATUS
Publication number
20240297010
Publication date
Sep 5, 2024
NuFlare Technology, Inc.
Eita FUJISAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROL METHOD OF WRITING APPARATUS AND WRITING APPARATUS
Publication number
20230111566
Publication date
Apr 13, 2023
NuFlare Technology, Inc.
Eita FUJISAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING METHOD AND CHARGED PARTICLE BEAM WRIT...
Publication number
20230102923
Publication date
Mar 30, 2023
NuFlare Technology, Inc.
Haruyuki NOMURA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MULTI-CHARGED-PARTICLE-BEAM WRITING METHOD, MULTI-CHARGED-PARTICLE-...
Publication number
20230078311
Publication date
Mar 16, 2023
NuFlare Technology, Inc.
Taku YAMADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
Publication number
20220319807
Publication date
Oct 6, 2022
NuFlare Technology, Inc.
Takahito NAKAYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON BEAM WRITING APPARATUS AND CATHODE LIFE SPAN PREDICTION ME...
Publication number
20220230834
Publication date
Jul 21, 2022
NuFlare Technology, Inc.
Satoshi NAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM ADJUSTMENT METHOD, CHARGED PARTICLE BEAM DRAW...
Publication number
20220068591
Publication date
Mar 3, 2022
NuFlare Technology, Inc.
Ryoichi KAKEHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
Publication number
20200258715
Publication date
Aug 13, 2020
NuFlare Technology, Inc.
Takahito NAKAYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING METHOD AND CHARGED PARTICLE BEAM WRIT...
Publication number
20190237297
Publication date
Aug 1, 2019
NuFlare Technology, Inc.
Rieko NISHIMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
Publication number
20190122858
Publication date
Apr 25, 2019
NuFlare Technology, Inc.
Takahito NAKAYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
Publication number
20190122859
Publication date
Apr 25, 2019
NuFlare Technology, Inc.
Takahito NAKAYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS, METHOD OF ADJUSTING BEAM I...
Publication number
20190115185
Publication date
Apr 18, 2019
NuFlare Technology, Inc.
Takahito NAKAYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND METHOD FOR DIAGNOSING F...
Publication number
20190080877
Publication date
Mar 14, 2019
NuFlare Technology, Inc.
Takahito NAKAYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS, METHOD OF ADJUSTING BEAM I...
Publication number
20180076002
Publication date
Mar 15, 2018
NuFlare Technology, Inc.
Takahito NAKAYAMA
B82 - NANO-TECHNOLOGY
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS, METHOD OF ADJUSTING BEAM I...
Publication number
20160071682
Publication date
Mar 10, 2016
NuFlare Technology, Inc.
Takahito NAKAYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS, METHOD OF ADJUSTING BEAM I...
Publication number
20140203185
Publication date
Jul 24, 2014
NuFlare Technology, Inc.
Takahito NAKAYAMA
B82 - NANO-TECHNOLOGY
Information
Patent Application
SHAPING OFFSET ADJUSTMENT METHOD AND CHARGED PARTICLE BEAM DRAWING...
Publication number
20130256555
Publication date
Oct 3, 2013
NuFlare Technology, Inc.
Takahito NAKAYAMA
B82 - NANO-TECHNOLOGY
Information
Patent Application
ELECTRON BEAM WRITING APPARATUS AND ELECTRON BEAM WRITING METHOD
Publication number
20130214172
Publication date
Aug 22, 2013
NuFlare Technology, Inc.
Takanao Touya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON BEAM WRITING APPARATUS AND ELECTRON BEAM WRITING METHOD
Publication number
20130216953
Publication date
Aug 22, 2013
NuFlare Technology, Inc.
Takanao TOUYA
B82 - NANO-TECHNOLOGY
Information
Patent Application
METHOD OF ACQUIRING OFFSET DEFLECTION AMOUNT FOR SHAPED BEAM AND LI...
Publication number
20100001203
Publication date
Jan 7, 2010
NuFlare Technology, Inc.
Takahito Nakayama
B82 - NANO-TECHNOLOGY
Information
Patent Application
FOCUSING METHOD OF CHARGED PARTICLE BEAM AND ASTIGMATISM ADJUSTING...
Publication number
20080217553
Publication date
Sep 11, 2008
NuFlare Technology, Inc.
Kenji Ohtoshi
B82 - NANO-TECHNOLOGY