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Takahito UMEHARA

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  • Oshu-shi, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    METHOD OF CLEANING EXHAUST PIPE
    • Publication number 20210180182
    • Publication date Jun 17, 2021
    • TOKYO ELECTRON LIMITED
    • Takahito UMEHARA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE AND FILM DEPOSITION...
    • Publication number 20190172707
    • Publication date Jun 6, 2019
    • TOKYO ELECTRON LIMITED
    • Takahito UMEHARA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Etching Method and Method of Filling Recessed Pattern Using the Same
    • Publication number 20190157098
    • Publication date May 23, 2019
    • TOKYO ELECTRON LIMITED
    • Takahito UMEHARA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF CLEANING EXHAUST PIPE
    • Publication number 20190078198
    • Publication date Mar 14, 2019
    • TOKYO ELECTRON LIMITED
    • Takahito UMEHARA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR REDUCING METAL CONTAMINATION AND FILM DEPOSITION APPARATUS
    • Publication number 20180282862
    • Publication date Oct 4, 2018
    • TOKYO ELECTRON LIMITED
    • Takahito UMEHARA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CLEANING METHOD AND FILM DEPOSITION APPARATUS
    • Publication number 20180155829
    • Publication date Jun 7, 2018
    • TOKYO ELECTRON LIMITED
    • Tatsuya TAMURA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS
    • Publication number 20170125282
    • Publication date May 4, 2017
    • TOKYO ELECTRON LIMITED
    • Takahito UMEHARA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM DEPOSITION APPARATUS
    • Publication number 20150345015
    • Publication date Dec 3, 2015
    • TOKYO ELECTRON LIMITED
    • Takashi CHIBA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Film Forming Apparatus
    • Publication number 20150329964
    • Publication date Nov 19, 2015
    • TOKYO ELECTRON LIMITED
    • Hideomi HANE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD FOR PROCESSING A SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20150214029
    • Publication date Jul 30, 2015
    • TOKYO ELECTRON LIMITED
    • Hideomi HANE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Vapor-phase growing unit
    • Publication number 20060257568
    • Publication date Nov 16, 2006
    • Kazuhide Hasebe
    • C30 - CRYSTAL GROWTH
  • Information Patent Application

    Film formation method and apparatus for semiconductor process
    • Publication number 20050176261
    • Publication date Aug 11, 2005
    • Takahito Umehara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Capacitor structure and film forming method and apparatus
    • Publication number 20040195653
    • Publication date Oct 7, 2004
    • Yuichiro Morozumi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Gaseous phase growing device
    • Publication number 20030186560
    • Publication date Oct 2, 2003
    • Kazuhide Hasebe
    • C30 - CRYSTAL GROWTH