Takakazu Yamada

Person

Shizuoka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Thin film formation method
- Patent number 11,189,482
- Issue date Nov 30, 2021
- Ulvac, Inc.
- Masanobu Hatanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin film production apparatus and inner block for thin film produc...
- Patent number 8,747,555
- Issue date Jun 10, 2014
- ULVAC, Inc.
- Takakazu Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for the preparation of film
- Patent number 8,591,655
- Issue date Nov 26, 2013
- ULVAC, Inc.
- Takeshi Masuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shower head, device and method for manufacturing thin films
- Patent number 8,262,798
- Issue date Sep 11, 2012
- ULVAC, Inc.
- Takakazu Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas head and thin-film manufacturing apparatus
- Patent number 8,197,599
- Issue date Jun 12, 2012
- ULVAC, Inc.
- Takakazu Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film-forming apparatus and film-forming method
- Patent number 8,168,001
- Issue date May 1, 2012
- ULVAC, Inc.
- Hiroto Uchida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mixing box, and apparatus and method for producing films
- Patent number 8,118,935
- Issue date Feb 21, 2012
- ULVAC, Inc.
- Takakazu Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device and method for manufacturing thin films
- Patent number 7,618,493
- Issue date Nov 17, 2009
- Ulvac, Inc.
- Takakazu Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mixer, and device and method for manufacturing thin-film
- Patent number 6,933,010
- Issue date Aug 23, 2005
- ULVAC, Inc.
- Takakazu Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
THIN FILM FORMATION METHOD
- Publication number 20190355576
- Publication date Nov 21, 2019
- Ulvac, Inc.
- Masanobu HATANAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING TANTALUM NITRIDE FILM AND FILM-FORMING APPARATUS...
- Publication number 20110318505
- Publication date Dec 29, 2011
- Akiko Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20100000673
- Publication date Jan 7, 2010
- ULVAC, Inc.
- Takeshi Masuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20090311417
- Publication date Dec 17, 2009
- ULVAC, Inc.
- Takeshi Masuda
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
Gas Head and Thin-Film Manufacturing Apparatus
- Publication number 20090250004
- Publication date Oct 8, 2009
- ULVAC, Inc.
- Takakazu Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM PRODUCTION APPARATUS AND INNER BLOCK FOR THIN FILM PRODUC...
- Publication number 20090159006
- Publication date Jun 25, 2009
- Ulvac, Inc.
- Takakazu Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for preparing oxide thin film and method for preparing th...
- Publication number 20070054472
- Publication date Mar 8, 2007
- Yutaka Nishioka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Mixing box, and apparatus and method for producing films
- Publication number 20050211168
- Publication date Sep 29, 2005
- ULVAC Inc.
- Takakazu Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for the preparation of film
- Publication number 20050199182
- Publication date Sep 15, 2005
- ULVAC, Inc.
- Takeshi Masuda
- C30 - CRYSTAL GROWTH
Information Patent Application
Device and method for manufacturing thin films
- Publication number 20050059246
- Publication date Mar 17, 2005
- Takakazu Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Shower head, device and method for manufacturing thin films
- Publication number 20050056217
- Publication date Mar 17, 2005
- Takakazu Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Mixer, and device and method for manufacturing thin-film
- Publication number 20040089235
- Publication date May 13, 2004
- Takakazu Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film-forming apparatus and film-forming method
- Publication number 20030198741
- Publication date Oct 23, 2003
- ULVAC, Inc.
- Hiroto Uchida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vacuum processing apparatus and multi-chamber vacuum processing app...
- Publication number 20020000197
- Publication date Jan 3, 2002
- Takeshi Masuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Takakazu Yamada

Person

Patents Grantslast 30 patents

Thin film formation method

Thin film production apparatus and inner block for thin film produc...

Apparatus for the preparation of film

Shower head, device and method for manufacturing thin films

Gas head and thin-film manufacturing apparatus

Film-forming apparatus and film-forming method

Mixing box, and apparatus and method for producing films

Device and method for manufacturing thin films

Mixer, and device and method for manufacturing thin-film

Patents Applicationslast 30 patents

THIN FILM FORMATION METHOD

METHOD FOR FORMING TANTALUM NITRIDE FILM AND FILM-FORMING APPARATUS...

FILM FORMING METHOD AND FILM FORMING APPARATUS

FILM FORMING METHOD AND FILM FORMING APPARATUS

Gas Head and Thin-Film Manufacturing Apparatus

THIN FILM PRODUCTION APPARATUS AND INNER BLOCK FOR THIN FILM PRODUC...

Apparatus for preparing oxide thin film and method for preparing th...

Mixing box, and apparatus and method for producing films

Apparatus for the preparation of film

Device and method for manufacturing thin films

Shower head, device and method for manufacturing thin films

Mixer, and device and method for manufacturing thin-film

Film-forming apparatus and film-forming method

Vacuum processing apparatus and multi-chamber vacuum processing app...