Takaki KOBUNE

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Electrode for plasma processing apparatus and plasma processing app...
- Patent number 12,165,850
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Takaki Kobune
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 12,148,598
- Issue date Nov 19, 2024
- Tokyo Electron Limited
- Lifu Li
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ELECTRODE FOR PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING APP...
- Publication number 20220344127
- Publication date Oct 27, 2022
- TOKYO ELECTRON LIMITED
- Takaki KOBUNE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UPPER ELECTRODE ASSEMBLY
- Publication number 20220319815
- Publication date Oct 6, 2022
- TOKYO ELECTRON LIMITED
- Lifu LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20220254611
- Publication date Aug 11, 2022
- TOKYO ELECTRON LIMITED
- Lifu LI
- G05 - CONTROLLING REGULATING
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20220130645
- Publication date Apr 28, 2022
- TOKYO ELECTRON LIMITED
- Takaki KOBUNE
- H01 - BASIC ELECTRIC ELEMENTS