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Takako Fujisawa
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Tokai, JP
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Patents Grants
last 30 patents
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Patent Grant
Inspection apparatus for inspecting patterns of a substrate
Patent number
8,036,447
Issue date
Oct 11, 2011
Hitachi High-Technologies Corporation
Koichi Hayakawa
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Image processing unit for wafer inspection tool
Patent number
7,889,911
Issue date
Feb 15, 2011
Hitachi High-Technologies Corporation
Michio Nakano
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Image processing unit for wafer inspection tool
Patent number
7,421,110
Issue date
Sep 2, 2008
Hitachi High-Technologies Corporation
Michio Nakano
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
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Patent Application
INSPECTION APPARATUS FOR INSPECTING PATTERNS OF A SUBSTRATE
Publication number
20100008564
Publication date
Jan 14, 2010
Hitachi High-Technologies Corporation
Koichi Hayakawa
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
IMAGE PROCESSING UNIT FOR WAFER INSPECTION TOOL
Publication number
20080285841
Publication date
Nov 20, 2008
Michio Nakano
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Inspection apparatus for inspecting patterns of a substrate
Publication number
20060171593
Publication date
Aug 3, 2006
Hitachi High-Technologies Corporation
Koichi Hayakawa
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Image processing unit for wafer inspection tool
Publication number
20040170313
Publication date
Sep 2, 2004
Michio Nakano
G06 - COMPUTING CALCULATING COUNTING