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Takamaro Kikkawa
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Hiroshima, JP
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Patents Grants
last 30 patents
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Patent Grant
Method for producing low-k film, semiconductor device, and method f...
Patent number
8,253,251
Issue date
Aug 28, 2012
Elpida Memory, Inc.
Yoshinori Cho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for producing low-k l film, semiconductor device, and method...
Patent number
8,030,221
Issue date
Oct 4, 2011
Elpida Memory, Inc.
Yoshinori Cho
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
METHOD FOR PRODUCING LOW-k FILM, SEMICONDUCTOR DEVICE, AND METHOD F...
Publication number
20110309511
Publication date
Dec 22, 2011
Elpida Memory, Inc.
Yoshinori CHO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR PRODUCING LOW-k FILM, SEMICONDUCTOR DEVICE, AND METHOD F...
Publication number
20100289143
Publication date
Nov 18, 2010
Elpida Memory, Inc.
Yoshinori Cho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor Device
Publication number
20080106469
Publication date
May 8, 2008
Japan Science and Technology Agency
Takamaro Kikkawa
H01 - BASIC ELECTRIC ELEMENTS