Takamasa Chikuma

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system and substrate position correction method
- Patent number 9,318,363
- Issue date Apr 19, 2016
- Tokyo Electron Limited
- Kozo Kai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing system
- Patent number 9,223,305
- Issue date Dec 29, 2015
- Tokyo Electron Limited
- Gaku Ikeda
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE POSITION CORRECTION METHOD
- Publication number 20150005928
- Publication date Jan 1, 2015
- Kozo Kai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING SYSTEM
- Publication number 20130013240
- Publication date Jan 10, 2013
- TOKYO ELECTON LIMITED
- Gaku Ikeda
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...