Takamitsu Komaki

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Detector that detects relative positions of marks while blocking no...
- Patent number 12,098,913
- Issue date Sep 24, 2024
- Canon Kabushiki Kaisha
- Takamitsu Komaki
- G01 - MEASURING TESTING
Information Patent Grant
Imprint apparatus and article manufacturing method
- Patent number 11,673,313
- Issue date Jun 13, 2023
- Canon Kabushiki Kaisha
- Kenji Yaegashi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Measurement apparatus, lithography apparatus, and method of manufac...
- Patent number 11,537,056
- Issue date Dec 27, 2022
- Canon Kabushiki Kaisha
- Takamitsu Komaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position measurement apparatus, overlay inspection apparatus, posit...
- Patent number 11,372,342
- Issue date Jun 28, 2022
- Canon Kabushiki Kaisha
- Toshiki Iwai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment apparatus, alignment method, lithography apparatus, and m...
- Patent number 11,188,001
- Issue date Nov 30, 2021
- Canon Kabushiki Kaisha
- Takashi Shibayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measurement device, imprint apparatus, method for manufacturing pro...
- Patent number 11,181,363
- Issue date Nov 23, 2021
- Canon Kabushiki Kaisha
- Kenji Yaegashi
- G01 - MEASURING TESTING
Information Patent Grant
Detection device, imprint apparatus, planarization device, detectio...
- Patent number 10,777,440
- Issue date Sep 15, 2020
- Canon Kabushiki Kaisha
- Toshiki Iwai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Imprint apparatus and article manufacturing method
- Patent number 10,732,522
- Issue date Aug 4, 2020
- Canon Kabushiki Kaisha
- Takamitsu Komaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Detection device, imprint apparatus, method of manufacturing articl...
- Patent number 10,732,523
- Issue date Aug 4, 2020
- Canon Kabushiki Kaisha
- Takamitsu Komaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detection apparatus, lithography apparatus, and method of manufactu...
- Patent number 10,545,416
- Issue date Jan 28, 2020
- Canon Kabushiki Kaisha
- Takamitsu Komaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
DETECTOR, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20210372776
- Publication date Dec 2, 2021
- Canon Kabushiki Kaisha
- Takamitsu Komaki
- G01 - MEASURING TESTING
Information Patent Application
POSITION MEASUREMENT APPARATUS, OVERLAY INSPECTION APPARATUS, POSIT...
- Publication number 20210263432
- Publication date Aug 26, 2021
- Canon Kabushiki Kaisha
- Toshiki Iwai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFAC...
- Publication number 20200409277
- Publication date Dec 31, 2020
- Canon Kabushiki Kaisha
- Takamitsu Komaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20200376739
- Publication date Dec 3, 2020
- Canon Kabushiki Kaisha
- Kenji Yaegashi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20200331190
- Publication date Oct 22, 2020
- Canon Kabushiki Kaisha
- Tadao Nakamura
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
DETECTION DEVICE, IMPRINT APPARATUS, PLANARIZATION DEVICE, DETECTIO...
- Publication number 20190371642
- Publication date Dec 5, 2019
- Canon Kabushiki Kaisha
- Toshiki Iwai
- G01 - MEASURING TESTING
Information Patent Application
ALIGNMENT APPARATUS, ALIGNMENT METHOD, LITHOGRAPHY APPARATUS, AND M...
- Publication number 20190285996
- Publication date Sep 19, 2019
- Canon Kabushiki Kaisha
- Takashi Shibayama
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
DETECTION APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTU...
- Publication number 20190250525
- Publication date Aug 15, 2019
- Canon Kabushiki Kaisha
- Takamitsu Komaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DETECTION DEVICE, IMPRINT APPARATUS, METHOD OF MANUFACTURING ARTICL...
- Publication number 20180259863
- Publication date Sep 13, 2018
- Canon Kabushiki Kaisha
- Takamitsu Komaki
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
MEASUREMENT DEVICE, IMPRINT APPARATUS, METHOD FOR MANUFACTURING PRO...
- Publication number 20170307367
- Publication date Oct 26, 2017
- Canon Kabushiki Kaisha
- Kenji Yaegashi
- G02 - OPTICS
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20160299444
- Publication date Oct 13, 2016
- Canon Kabushiki Kaisha
- Takamitsu Komaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Takamitsu Komaki

Person

Patents Grantslast 30 patents

Detector that detects relative positions of marks while blocking no...

Imprint apparatus and article manufacturing method

Measurement apparatus, lithography apparatus, and method of manufac...

Position measurement apparatus, overlay inspection apparatus, posit...

Alignment apparatus, alignment method, lithography apparatus, and m...

Measurement device, imprint apparatus, method for manufacturing pro...

Detection device, imprint apparatus, planarization device, detectio...

Imprint apparatus and article manufacturing method

Detection device, imprint apparatus, method of manufacturing articl...

Detection apparatus, lithography apparatus, and method of manufactu...

Patents Applicationslast 30 patents

DETECTOR, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE

POSITION MEASUREMENT APPARATUS, OVERLAY INSPECTION APPARATUS, POSIT...

MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFAC...

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD

IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE

DETECTION DEVICE, IMPRINT APPARATUS, PLANARIZATION DEVICE, DETECTIO...

ALIGNMENT APPARATUS, ALIGNMENT METHOD, LITHOGRAPHY APPARATUS, AND M...

DETECTION APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTU...

DETECTION DEVICE, IMPRINT APPARATUS, METHOD OF MANUFACTURING ARTICL...

MEASUREMENT DEVICE, IMPRINT APPARATUS, METHOD FOR MANUFACTURING PRO...

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD