Takamitsu Shigemoto

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Tsukuba-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of cleaning a film-forming apparatus
- Patent number 7,942,974
- Issue date May 17, 2011
- Kabushiki Kaisha Toshiba
- Naoki Tamaoki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF CLEANING FILM FORMING APPARATUS AND FILM FORMING APPARATUS
- Publication number 20100012153
- Publication date Jan 21, 2010
- Takamitsu Shigemoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR LOW TEMPERATURE THERMAL CLEANING
- Publication number 20080236482
- Publication date Oct 2, 2008
- Jun SONOBE
- B08 - CLEANING
Information Patent Application
METHOD FOR LOW TEMPERATURE THERMAL CLEANING
- Publication number 20080236483
- Publication date Oct 2, 2008
- Jun SONOBE
- B08 - CLEANING
Information Patent Application
Method of cleaning a film-forming apparatus and film-forming apparatus
- Publication number 20060065289
- Publication date Mar 30, 2006
- Naoki Tamaoki
- B08 - CLEANING