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Takanao Touya
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Kanagawa, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Charged particle beam writing apparatus
Patent number
12,009,175
Issue date
Jun 11, 2024
NuFlare Technology, Inc.
Hirofumi Morita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi charged particle beam writing apparatus
Patent number
11,908,659
Issue date
Feb 20, 2024
NuFlare Technology, Inc.
Toshiki Kimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi charged particle beam adjustment method, multi charged partic...
Patent number
11,804,360
Issue date
Oct 31, 2023
NuFlare Technology, Inc.
Tsubasa Nanao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Charged particle beam writing apparatus, method of adjusting beam i...
Patent number
11,145,483
Issue date
Oct 12, 2021
NuFlare Technology, Inc.
Takahito Nakayama
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
Patent number
10,998,164
Issue date
May 4, 2021
NuFlare Technology, Inc.
Takanao Touya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing method and charged particle beam writ...
Patent number
10,504,686
Issue date
Dec 10, 2019
NuFlare Technology, Inc.
Munehiro Ogasawara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Blanking device for multi charged particle beams, and multi charged...
Patent number
10,224,171
Issue date
Mar 5, 2019
NuFlare Technology, Inc.
Takanao Touya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing apparatus, method of adjusting beam i...
Patent number
10,192,712
Issue date
Jan 29, 2019
NuFlare Technology, Inc.
Takahito Nakayama
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Multi charged particle beam irradiation apparatus, multi charged pa...
Patent number
9,916,962
Issue date
Mar 13, 2018
NuFlare Technology, Inc.
Shinsuke Nishimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing apparatus, method of adjusting beam i...
Patent number
9,824,849
Issue date
Nov 21, 2017
NuFlare Technology, Inc.
Takahito Nakayama
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Inspection system and method for inspecting line width and/or posit...
Patent number
9,406,117
Issue date
Aug 2, 2016
NuFlare Technology, Inc.
Takanao Touya
G01 - MEASURING TESTING
Information
Patent Grant
Electron beam writing apparatus and electron beam writing method
Patent number
9,373,424
Issue date
Jun 21, 2016
Nuflare Technology, Inc.
Takanao Touya
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Charged particle beam pattern writing method and charged particle b...
Patent number
9,343,266
Issue date
May 17, 2016
Nuflare Technology, Inc.
Munehiro Ogasawara
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Charged particle beam writing apparatus, method of adjusting beam i...
Patent number
9,236,223
Issue date
Jan 12, 2016
NuFlare Technology, Inc.
Takahito Nakayama
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Inspection system and method for inspecting line width and/or posit...
Patent number
9,036,896
Issue date
May 19, 2015
Nuflare Technology, Inc.
Takanao Touya
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Multi charged particle beam writing apparatus and multi charged par...
Patent number
8,927,941
Issue date
Jan 6, 2015
Nuflare Technology, Inc.
Takanao Touya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing apparatus
Patent number
8,884,254
Issue date
Nov 11, 2014
NuFlare Technology, Inc.
Takanao Touya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi charged particle beam writing apparatus
Patent number
8,835,868
Issue date
Sep 16, 2014
NuFlare Technology, Inc.
Takanao Touya
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Electron beam writing apparatus and electron beam writing method
Patent number
8,816,276
Issue date
Aug 26, 2014
Nuflare Technology, Inc.
Takanao Touya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
Patent number
8,791,422
Issue date
Jul 29, 2014
NuFlare Technology, Inc.
Takanao Touya
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Charged particle beam writing apparatus and method
Patent number
8,610,096
Issue date
Dec 17, 2013
Nuflare Technology, Inc.
Takanao Touya
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Electron beam writing apparatus and method
Patent number
8,067,753
Issue date
Nov 29, 2011
Nuflare Technology, Inc.
Takanao Touya
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MULTI CHARGED PARTICLE BEAM WRITING METHOD AND MULTI CHARGED PARTIC...
Publication number
20230055778
Publication date
Feb 23, 2023
NuFlare Technology, Inc.
Hirofumi MORITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS
Publication number
20220399181
Publication date
Dec 15, 2022
NuFlare Technology, Inc.
Toshiki KIMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS
Publication number
20220328278
Publication date
Oct 13, 2022
NuFlare Technology, Inc.
Hirofumi MORITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
Publication number
20190371565
Publication date
Dec 5, 2019
NuFlare Technology, Inc.
Takanao TOUYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS, METHOD OF ADJUSTING BEAM I...
Publication number
20190115185
Publication date
Apr 18, 2019
NuFlare Technology, Inc.
Takahito NAKAYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING METHOD AND CHARGED PARTICLE BEAM WRIT...
Publication number
20180342366
Publication date
Nov 29, 2018
NuFlare Technology, Inc.
Munehiro OGASAWARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS, METHOD OF ADJUSTING BEAM I...
Publication number
20180076002
Publication date
Mar 15, 2018
NuFlare Technology, Inc.
Takahito NAKAYAMA
B82 - NANO-TECHNOLOGY
Information
Patent Application
BLANKING DEVICE FOR MULTI CHARGED PARTICLE BEAMS, AND MULTI CHARGED...
Publication number
20170345612
Publication date
Nov 30, 2017
NuFlare Technology, Inc.
Takanao TOUYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI CHARGED PARTICLE BEAM IRRADIATION APPARATUS, MULTI CHARGED PA...
Publication number
20170309440
Publication date
Oct 26, 2017
NuFlare Technology, Inc.
Shinsuke NISHIMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS, METHOD OF ADJUSTING BEAM I...
Publication number
20160071682
Publication date
Mar 10, 2016
NuFlare Technology, Inc.
Takahito NAKAYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INSPECTION SYSTEM AND METHOD FOR INSPECTING LINE WIDTH AND/OR POSIT...
Publication number
20150193918
Publication date
Jul 9, 2015
NuFlare Technology, Inc.
Takanao Touya
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS, METHOD OF ADJUSTING BEAM I...
Publication number
20140203185
Publication date
Jul 24, 2014
NuFlare Technology, Inc.
Takahito NAKAYAMA
B82 - NANO-TECHNOLOGY
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS
Publication number
20140175303
Publication date
Jun 26, 2014
NuFlare Technology, Inc.
Takanao TOUYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS
Publication number
20140175302
Publication date
Jun 26, 2014
NuFlare Technology, Inc.
Takanao TOUYA
B82 - NANO-TECHNOLOGY
Information
Patent Application
CHARGED PARTICLE BEAM PATTERN WRITING METHOD AND CHARGED PARTICLE B...
Publication number
20140061499
Publication date
Mar 6, 2014
NuFlare Technology, Inc.
Munehiro Ogasawara
B82 - NANO-TECHNOLOGY
Information
Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...
Publication number
20130240750
Publication date
Sep 19, 2013
NuFlare Technology, Inc.
Takanao Touya
B82 - NANO-TECHNOLOGY
Information
Patent Application
ELECTRON BEAM WRITING APPARATUS AND ELECTRON BEAM WRITING METHOD
Publication number
20130214172
Publication date
Aug 22, 2013
NuFlare Technology, Inc.
Takanao Touya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON BEAM WRITING APPARATUS AND ELECTRON BEAM WRITING METHOD
Publication number
20130216953
Publication date
Aug 22, 2013
NuFlare Technology, Inc.
Takanao TOUYA
B82 - NANO-TECHNOLOGY
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
Publication number
20130149646
Publication date
Jun 13, 2013
NuFlare Technology, Inc.
Takanao TOUYA
B82 - NANO-TECHNOLOGY
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND METHOD
Publication number
20120193553
Publication date
Aug 2, 2012
NuFlare Technology, Inc.
Takanao TOUYA
B82 - NANO-TECHNOLOGY
Information
Patent Application
INSPECTION SYSTEM AND METHOD FOR INSPECTING LINE WIDTH AND/OR POSIT...
Publication number
20110255770
Publication date
Oct 20, 2011
Kabushiki Kaisha Toshiba
Takanao Touya
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
ELECTRON BEAM WRITING APPARATUS AND METHOD
Publication number
20090246655
Publication date
Oct 1, 2009
NuFlare Technology, Inc.
Takanao TOUYA
B82 - NANO-TECHNOLOGY