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Takanobu Hotta

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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    STRESS REDUCING METHOD
    • Publication number 20230227969
    • Publication date Jul 20, 2023
    • TOKYO ELECTRON LIMITED
    • Takuya KAWAGUCHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING METHOD AND TUNGSTEN FILM
    • Publication number 20230227976
    • Publication date Jul 20, 2023
    • TOKYO ELECTRON LIMITED
    • Takuya KAWAGUCHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND DEVICE FOR FORMING TUNGSTEN FILM, AND DEVICE FOR FORMING...
    • Publication number 20230212738
    • Publication date Jul 6, 2023
    • Tokyo Electron Limited
    • Kensaku NARUSHIMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    APPARATUS FOR FORMING FILM ON SUBSTRATE AND METHOD FOR FORMING FILM...
    • Publication number 20230062123
    • Publication date Mar 2, 2023
    • TOKYO ELECTRON LIMITED
    • Toshio TAKAGI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SHOWERHEAD AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20220396875
    • Publication date Dec 15, 2022
    • TOKYO ELECTRON LIMITED
    • Takanobu HOTTA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SHOWERHEAD AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20220396876
    • Publication date Dec 15, 2022
    • TOKYO ELECTRON LIMITED
    • Takuya KAWAGUCHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GAS SUPPLY DEVICE AND GAS SUPPLY METHOD
    • Publication number 20220356581
    • Publication date Nov 10, 2022
    • Tokyo Electron Limited
    • Kensaku NARUSHIMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20210010130
    • Publication date Jan 14, 2021
    • TOKYO ELECTRON LIMITED
    • Kensaku NARUSHIMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate Processing Method and Film Forming System
    • Publication number 20200258747
    • Publication date Aug 13, 2020
    • TOKYO ELECTRON LIMITED
    • Kensaku NARUSHIMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING METHOD AND FILM FORMING APPARATUS
    • Publication number 20200098624
    • Publication date Mar 26, 2020
    • TOKYO ELECTRON LIMITED
    • Kensaku NARUSHIMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Method of Forming Tungsten Film and Controller
    • Publication number 20190292656
    • Publication date Sep 26, 2019
    • TOKYO ELECTRON LIMITED
    • Kensaku NARUSHIMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FLOW RATE CONTROL METHOD, FLOW RATE CONTROL DEVICE, AND FILM FORMIN...
    • Publication number 20190284698
    • Publication date Sep 19, 2019
    • TOKYO ELECTRON LIMITED
    • Kennan MO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Film Forming Method
    • Publication number 20190164768
    • Publication date May 30, 2019
    • TOKYO ELECTRON LIMITED
    • Kensaku NARUSHIMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TUNGSTEN FILM FORMING METHOD AND STORAGE MEDIUM
    • Publication number 20170283942
    • Publication date Oct 5, 2017
    • TOKYO ELECTRON LIMITED
    • Kenji SUZUKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TUNGSTEN FILM FORMING METHOD
    • Publication number 20160379879
    • Publication date Dec 29, 2016
    • TOKYO ELECTRON LIMITED
    • Takanobu HOTTA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF REDUCING STRESS IN METAL FILM AND METAL FILM FORMING METHOD
    • Publication number 20160351402
    • Publication date Dec 1, 2016
    • TOKYO ELECTRON LIMITED
    • Kenji SUZUKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Method of Forming Metal Film
    • Publication number 20160348234
    • Publication date Dec 1, 2016
    • TOKYO ELECTRON LIMITED
    • Kenji SUZUKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF FORMING TUNGSTEN FILM
    • Publication number 20160284553
    • Publication date Sep 29, 2016
    • TOKYO ELECTRON LIMITED
    • Kenji SUZUKI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    TUNGSTEN FILM FORMING METHOD
    • Publication number 20160233099
    • Publication date Aug 11, 2016
    • TOKYO ELECTRON LIMITED
    • Kensaku NARUSHIMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Tungsten Film Forming Method
    • Publication number 20160040287
    • Publication date Feb 11, 2016
    • TOKYO ELECTRON LIMITED
    • Yasushi AKASAKA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Gas Supply Mechanism, Gas Supplying Method, Film Forming Apparatus...
    • Publication number 20150275367
    • Publication date Oct 1, 2015
    • TOKYO ELECTRON LIMITED
    • Masayuki MOROI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Tungsten Film Forming Method, Semiconductor Device Manufacturing Me...
    • Publication number 20150279735
    • Publication date Oct 1, 2015
    • TOKYO ELECTRON LIMITED
    • Takanobu HOTTA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TUNGSTEN FILM FORMING METHOD
    • Publication number 20150279736
    • Publication date Oct 1, 2015
    • TOKYO ELECTRON LIMITED
    • Takanobu HOTTA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD FOR FORMING METAL NITRIDE FILM
    • Publication number 20120034793
    • Publication date Feb 9, 2012
    • TOKYO ELECTRON LIMITED
    • Kensaku Narushima
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...