Takanobu Nakashima

Person

  • Tokyo, JP

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    Substrate processing apparatus

    • Publication number 20020124960
    • Publication date Sep 12, 2002
    • Hitachi Kokusai Electric Inc.
    • Takanobu Nakashima
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Dual loading port semiconductor processing equipment

    • Publication number 20010038783
    • Publication date Nov 8, 2001
    • Hitachi Kokusai Electric Inc.
    • Takanobu Nakashima
    • H01 - BASIC ELECTRIC ELEMENTS