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Takanobu Nakashima
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Dual loading port semiconductor processing equipment
Patent number
RE43023
Issue date
Dec 13, 2011
Hitachi Kokusai Electric Inc.
Takanobu Nakashima
414 - Material or article handling
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Patent Grant
Dual loading port semiconductor processing equipment
Patent number
6,641,350
Issue date
Nov 4, 2003
HITACHI KOKUSAI ELECTRIC INC.
Takanobu Nakashima
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Substrate processing apparatus
Publication number
20020124960
Publication date
Sep 12, 2002
Hitachi Kokusai Electric Inc.
Takanobu Nakashima
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Dual loading port semiconductor processing equipment
Publication number
20010038783
Publication date
Nov 8, 2001
Hitachi Kokusai Electric Inc.
Takanobu Nakashima
H01 - BASIC ELECTRIC ELEMENTS