Takanori Eto

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Kurokawa-gun, JP

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Patents Grantslast 30 patents

Information Patent Grant
Etching method and substrate processing apparatus
- Patent number 11,810,792
- Issue date Nov 7, 2023
- Tokyo Electron Limited
- Takanori Eto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method and substrate processing apparatus
- Patent number 11,688,650
- Issue date Jun 27, 2023
- Tokyo Electron Limited
- Gaku Shimoda
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ETCHING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220084836
- Publication date Mar 17, 2022
- TOKYO ELECTRON LIMITED
- Takanori ETO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210005519
- Publication date Jan 7, 2021
- TOKYO ELECTRON LIMITED
- Gaku SHIMODA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20190051500
- Publication date Feb 14, 2019
- TOKYO ELECTRON LIMITED
- Takanori Eto
- H01 - BASIC ELECTRIC ELEMENTS