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Takanori Kawamoto
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Kyoto, JP
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last 30 patents
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Patent Grant
Substrate heat-treating apparatus
Patent number
6,062,852
Issue date
May 16, 2000
Dainippon Screen Mfg. Co., Ltd.
Takanori Kawamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, substrate transport apparatus and s...
Patent number
6,051,101
Issue date
Apr 18, 2000
Dainippon Screen Mfg. Co., Ltd.
Masami Ohtani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate spin treating apparatus
Patent number
5,846,327
Issue date
Dec 8, 1998
Dainippon Screen Mfg. Co. Ltd.
Takanori Kawamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY