Takanori Miyazaki

Person

Saga, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for polishing rear surface of substrate, system for polis...
- Patent number 9,095,953
- Issue date Aug 4, 2015
- Tokyo Electron Limited
- Mitsunori Nakamori
- B24 - GRINDING POLISHING
Information Patent Grant
Processing apparatus, processing system and processing method
- Patent number 6,827,814
- Issue date Dec 7, 2004
- Tokyo Electron Limited
- Hiroki Taniyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate surface processing apparatus and method
- Patent number 6,652,662
- Issue date Nov 25, 2003
- Tokyo Electron Limited
- Akira Ishihara
- B08 - CLEANING
Information Patent Grant
Device for processing substrate
- Patent number 6,589,338
- Issue date Jul 8, 2003
- Tokyo Electron Limited
- Mitsunori Nakamori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning tool, having permeable cleaning head
- Patent number 6,554,010
- Issue date Apr 29, 2003
- Tokyo Electron Limited
- Keizo Hirose
- B08 - CLEANING
Information Patent Grant
Scrub washing method
- Patent number 6,491,760
- Issue date Dec 10, 2002
- Tokyo Electron Limited
- Akira Ishihara
- B08 - CLEANING
Information Patent Grant
Scrub washing apparatus and scrub washing method
- Patent number 6,292,972
- Issue date Sep 25, 2001
- Tokyo Electron Limited
- Akira Ishihara
- B08 - CLEANING
Information Patent Grant
Processing apparatus
- Patent number 6,178,580
- Issue date Jan 30, 2001
- Tokyo Electron Limited
- Akira Ishihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for cleaning both sides of substrate
- Patent number 6,115,867
- Issue date Sep 12, 2000
- Tokyo Electron Limited
- Satoshi Nakashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer drying apparatus and fire-extinguishing method therefor
- Patent number 5,431,179
- Issue date Jul 11, 1995
- Tokyo Electron Limited
- Takanori Miyazaki
- F26 - DRYING
Information Patent Grant
Substrate washing device
- Patent number 5,370,142
- Issue date Dec 6, 1994
- Tokyo Electron Limited
- Mitsuo Nishi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning apparatus
- Patent number 5,361,787
- Issue date Nov 8, 1994
- Tokyo Electron Kabushiki Kaisha
- Takanori Miyazaki
- B08 - CLEANING
Information Patent Grant
Cleaning device
- Patent number 5,299,584
- Issue date Apr 5, 1994
- Tokyo Electron Limited
- Takanori Miyazaki
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Apparatus for Polishing Rear Surface of Substrate, System for Polis...
- Publication number 20110312247
- Publication date Dec 22, 2011
- TOKYO ELECTRON LIMITED
- Mitsunori Nakamori
- B24 - GRINDING POLISHING
Information Patent Application
Processing apparatus, processing system and processing method
- Publication number 20010037858
- Publication date Nov 8, 2001
- Hiroki Taniyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scrub washing apparatus and scrub washing method
- Publication number 20010035200
- Publication date Nov 1, 2001
- Akira Ishihara
- G05 - CONTROLLING REGULATING

Takanori Miyazaki

Person

Patents Grantslast 30 patents

Apparatus for polishing rear surface of substrate, system for polis...

Processing apparatus, processing system and processing method

Substrate surface processing apparatus and method

Device for processing substrate

Substrate cleaning tool, having permeable cleaning head

Scrub washing method

Scrub washing apparatus and scrub washing method

Processing apparatus

Apparatus for cleaning both sides of substrate

Wafer drying apparatus and fire-extinguishing method therefor

Substrate washing device

Cleaning apparatus

Cleaning device

Patents Applicationslast 30 patents

Apparatus for Polishing Rear Surface of Substrate, System for Polis...

Processing apparatus, processing system and processing method

Scrub washing apparatus and scrub washing method