Takanori Nakatsuka

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Kudamatsu-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Vacuum processing apparatus and vacuum processing method
- Patent number 7,194,821
- Issue date Mar 27, 2007
- Hitachi High-Technologies Corporation
- Manabu Edamura
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
Vacuum processing apparatus and vacuum processing method
- Publication number 20060168844
- Publication date Aug 3, 2006
- Manabu Edamura
- G05 - CONTROLLING REGULATING