Takanori Nishizawa

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Chiba, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing of tungsten using a gas mixture comprising a fluo...
- Patent number 6,277,763
- Issue date Aug 21, 2001
- Applied Materials, Inc.
- Katsuhisa Kugimiya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...