Takanori Sakurai

Person

  • Yokohama, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Electrostatic chuck

    • Patent number 5,625,526
    • Issue date Apr 29, 1997
    • Tokyo Electron Limited
    • Masahide Watanabe
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY