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Takanori Sato
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Miyagi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Etching method and etching apparatus
Patent number
9,865,471
Issue date
Jan 9, 2018
Tokyo Electron Limited
Gaku Shimoda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device manufacturing method
Patent number
9,449,838
Issue date
Sep 20, 2016
Tokyo Electron Limited
Kazuto Ogawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method and plasma processing apparatus
Patent number
9,412,617
Issue date
Aug 9, 2016
Tokyo Electron Limited
Kazuki Narishige
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method
Patent number
9,384,992
Issue date
Jul 5, 2016
Tokyo Electron Limited
Kazuki Narishige
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device manufacturing method and computer-readable sto...
Patent number
9,355,861
Issue date
May 31, 2016
Tokyo Electron Limited
Manabu Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device manufacturing method
Patent number
9,039,913
Issue date
May 26, 2015
Tokyo Electron Limited
Kazuto Ogawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device manufacturing method and computer-readable sto...
Patent number
8,735,299
Issue date
May 27, 2014
Tokyo Electron Limited
Seiichi Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Solid-state imaging device and method for producing the same
Patent number
7,888,161
Issue date
Feb 15, 2011
FUJIFILM Corporation
Takanori Sato
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20240177973
Publication date
May 30, 2024
TOKYO ELECTRON LIMITED
Koki HIDAKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND ETCHING APPARATUS
Publication number
20160322230
Publication date
Nov 3, 2016
TOKYO ELECTRON LIMITED
Gaku SHIMODA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20150303069
Publication date
Oct 22, 2015
TOKYO ELECTRON LIMITED
Kazuki Narishige
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
Publication number
20150228500
Publication date
Aug 13, 2015
TOKYO ELECTRON LIMITED
Kazuto OGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND COMPUTER-READABLE STO...
Publication number
20150056816
Publication date
Feb 26, 2015
TOKYO ELECTRON LIMITED
Manabu Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
Publication number
20150037982
Publication date
Feb 5, 2015
TOKYO ELECTRON LIMITED
Kazuto OGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR MANUFACTURING APPARATUS AND S...
Publication number
20150011094
Publication date
Jan 8, 2015
TOKYO ELECTRON LIMITED
Kazuki Narishige
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND COMPUTER-READABLE STO...
Publication number
20120225561
Publication date
Sep 6, 2012
TOKYO ELECTRON LIMITED
Seiichi Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of Manufacturing a Solid Image Pick-Up Device and a Solid Im...
Publication number
20080237652
Publication date
Oct 2, 2008
Teiji Azumi
H01 - BASIC ELECTRIC ELEMENTS