Takanori Sato

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus and method of manufacturing article
- Patent number 10,481,508
- Issue date Nov 19, 2019
- Canon Kabushiki Kaisha
- Takanori Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method of manufacturing article
- Patent number 10,209,631
- Issue date Feb 19, 2019
- Canon Kabushiki Kaisha
- Takanori Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and device fabrication method
- Patent number 9,268,240
- Issue date Feb 23, 2016
- Canon Kabushiki Kaisha
- Takanori Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method of manufacturing de...
- Patent number 9,001,306
- Issue date Apr 7, 2015
- Canon Kabushiki Kaisha
- Takanori Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method of manufacturing de...
- Patent number 8,625,072
- Issue date Jan 7, 2014
- Canon Kabushiki Kaisha
- Takanori Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20190146359
- Publication date May 16, 2019
- Canon Kabushiki Kaisha
- Takanori Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20180074414
- Publication date Mar 15, 2018
- Canon Kabushiki Kaisha
- Takanori Sato
- G01 - MEASURING TESTING
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE FABRICATION METHOD
- Publication number 20140240687
- Publication date Aug 28, 2014
- Canon Kabushiki Kaisha
- Takanori Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING DE...
- Publication number 20140092374
- Publication date Apr 3, 2014
- Canon Kabushiki Kaisha
- Takanori Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING DE...
- Publication number 20110273686
- Publication date Nov 10, 2011
- Canon Kabushiki Kaisha
- Takanori Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SCANNING EXPOSURE APPARATUS, CONTROL METHOD THEREFOR, AND DEVICE MA...
- Publication number 20100110400
- Publication date May 6, 2010
- Canon Kabushiki Kaisha
- Takanori Sato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Takanori Sato

Person

Patents Grantslast 30 patents

Exposure apparatus and method of manufacturing article

Exposure apparatus and method of manufacturing article

Exposure apparatus, exposure method, and device fabrication method

Exposure apparatus, exposure method, and method of manufacturing de...

Exposure apparatus, exposure method, and method of manufacturing de...

Patents Applicationslast 30 patents

EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE

EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE

EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE FABRICATION METHOD

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING DE...

EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD OF MANUFACTURING DE...

SCANNING EXPOSURE APPARATUS, CONTROL METHOD THEREFOR, AND DEVICE MA...