TREA

Takanori Simura

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  • Kobe, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Lithography apparatus
    • Patent number 4,820,928
    • Issue date Apr 11, 1989
    • Hitachi, Ltd.
    • Mitsuo Ooyama
    • B82 - NANO-TECHNOLOGY