Takanori Yagita

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Ion implanter and particle detection method
- Patent number 11,699,569
- Issue date Jul 11, 2023
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Aki Ninomiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implanter and beam park device
- Patent number 11,017,978
- Issue date May 25, 2021
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Takanori Yagita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus
- Patent number 9,520,265
- Issue date Dec 13, 2016
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Takanori Yagita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus
- Patent number 9,431,214
- Issue date Aug 30, 2016
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Hiroshi Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus, beam parallelizing apparatus, and ion i...
- Patent number 9,343,262
- Issue date May 17, 2016
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Takanori Yagita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus, final energy filter, and ion implantati...
- Patent number 9,293,295
- Issue date Mar 22, 2016
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Takanori Yagita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus and ion implantation method
- Patent number 9,236,222
- Issue date Jan 12, 2016
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Takanori Yagita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus
- Patent number 9,208,991
- Issue date Dec 8, 2015
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Hiroshi Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus and ion implantation method
- Patent number 9,117,627
- Issue date Aug 25, 2015
- Sumitomo Heavy Industries Technology Co., Ltd.
- Kazuhisa Manabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus and control method thereof
- Patent number 8,692,216
- Issue date Apr 8, 2014
- Sen Corporation
- Hiroyuki Kariya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam processing apparatus
- Patent number 7,982,192
- Issue date Jul 19, 2011
- Sen Corporation
- Mitsukuni Tsukihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus and ion implantation method
- Patent number 7,851,772
- Issue date Dec 14, 2010
- Sen Corporation an SHI and Axcelis Company
- Mitsukuni Tsukihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus and method of converging/shaping ion bea...
- Patent number 7,755,067
- Issue date Jul 13, 2010
- Sen Corporation
- Mitsukuni Tsukihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Irradiation system with ion beam/charged particle beam
- Patent number 7,423,276
- Issue date Sep 9, 2008
- SEN Corporation, an SHI and Axcelis Company
- Takanori Yagita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam processing system and beam processing method
- Patent number 7,411,709
- Issue date Aug 12, 2008
- Sen Corporation
- Takanori Yagita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Irradiation system with ion beam/charged particle beam
- Patent number 7,315,034
- Issue date Jan 1, 2008
- SEN Corporation, an SHI and Axcelis Company
- Takanori Yagita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam space-charge compensation device and ion implantation system h...
- Patent number 7,276,711
- Issue date Oct 2, 2007
- SEN Corporation, an SHI and Axcelis Company
- Hiroshi Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ION IMPLANTER AND PARTICLE DETECTION METHOD
- Publication number 20220102112
- Publication date Mar 31, 2022
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Aki Ninomiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTER AND BEAM PARK DEVICE
- Publication number 20200152409
- Publication date May 14, 2020
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Takanori Yagita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD
- Publication number 20150357160
- Publication date Dec 10, 2015
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Takanori Yagita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION APPARATUS
- Publication number 20150340197
- Publication date Nov 26, 2015
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Hiroshi Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION APPARATUS
- Publication number 20150340202
- Publication date Nov 26, 2015
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Hiroshi Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION APPARATUS, FINAL ENERGY FILTER, AND ION IMPLANTATI...
- Publication number 20150279612
- Publication date Oct 1, 2015
- SEN Corporation
- Takanori Yagita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION APPARATUS
- Publication number 20150155129
- Publication date Jun 4, 2015
- SEN Corporation
- Takanori Yagita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD
- Publication number 20150064887
- Publication date Mar 5, 2015
- SEN Corporation
- Kazuhisa Manabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION APPARATUS, BEAM PARALLELIZING APPARATUS, AND ION I...
- Publication number 20150064888
- Publication date Mar 5, 2015
- SEN Corporation
- Takanori Yagita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION APPARATUS AND CONTROL METHOD THEREOF
- Publication number 20130256566
- Publication date Oct 3, 2013
- SEN Corporation
- Hiroyuki KARIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BEAM PROCESSING APPARATUS
- Publication number 20080258074
- Publication date Oct 23, 2008
- SEN Corporation, an SHI and Axcelis Company
- Mitsukuni TSUKIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Implantation Apparatus and Method of Converging/Shaping Ion Bea...
- Publication number 20080251734
- Publication date Oct 16, 2008
- SEN Corporation, an SHI and Axcelis Company
- Mitsukuni Tsukihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD
- Publication number 20080251713
- Publication date Oct 16, 2008
- SEN Corporation, an SHI and Axcelis Company
- Mitsukuni Tsukihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Beam processing system and beam processing method
- Publication number 20080002244
- Publication date Jan 3, 2008
- SEN CORPORATION
- Takanori Yagita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Irradiation system with ion beam/charged particle beam
- Publication number 20060113468
- Publication date Jun 1, 2006
- SUMITOMO EATON NOVA CORPORATION
- Takanori Yagita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Beam space-charge compensation device and ion implantation system h...
- Publication number 20060113491
- Publication date Jun 1, 2006
- SUMITOMO EATON NOVA CORPORATION
- Hiroshi Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Irradiation system with ion beam/charged particle beam
- Publication number 20060113467
- Publication date Jun 1, 2006
- SUMITOMO EATON NOVA CORPORATION
- Takanori Yagita
- H01 - BASIC ELECTRIC ELEMENTS

Takanori Yagita

Person

Patents Grantslast 30 patents

Ion implanter and particle detection method

Ion implanter and beam park device

Ion implantation apparatus

Ion implantation apparatus

Ion implantation apparatus, beam parallelizing apparatus, and ion i...

Ion implantation apparatus, final energy filter, and ion implantati...

Ion implantation apparatus and ion implantation method

Ion implantation apparatus

Ion implantation apparatus and ion implantation method

Ion implantation apparatus and control method thereof

Beam processing apparatus

Ion implantation apparatus and ion implantation method

Ion implantation apparatus and method of converging/shaping ion bea...

Irradiation system with ion beam/charged particle beam

Beam processing system and beam processing method

Irradiation system with ion beam/charged particle beam

Beam space-charge compensation device and ion implantation system h...

Patents Applicationslast 30 patents

ION IMPLANTER AND PARTICLE DETECTION METHOD

ION IMPLANTER AND BEAM PARK DEVICE

ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD

ION IMPLANTATION APPARATUS

ION IMPLANTATION APPARATUS

ION IMPLANTATION APPARATUS, FINAL ENERGY FILTER, AND ION IMPLANTATI...

ION IMPLANTATION APPARATUS

ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD

ION IMPLANTATION APPARATUS, BEAM PARALLELIZING APPARATUS, AND ION I...

ION IMPLANTATION APPARATUS AND CONTROL METHOD THEREOF

BEAM PROCESSING APPARATUS

Ion Implantation Apparatus and Method of Converging/Shaping Ion Bea...

ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD

Beam processing system and beam processing method

Irradiation system with ion beam/charged particle beam

Beam space-charge compensation device and ion implantation system h...

Irradiation system with ion beam/charged particle beam