Takao Inada

Person

Saga-Ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, mixing method, and substrate proces...
- Patent number 12,068,175
- Issue date Aug 20, 2024
- Tokyo Electron Limited
- Kouji Ogura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus
- Patent number 11,742,226
- Issue date Aug 29, 2023
- Tokyo Electron Limited
- Takahiko Otsu
- B08 - CLEANING
Information Patent Grant
Mixing apparatus, mixing method and substrate processing system
- Patent number 11,724,235
- Issue date Aug 15, 2023
- Tokyo Electron Limited
- Jun Nonaka
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 11,424,141
- Issue date Aug 23, 2022
- Tokyo Electron Limited
- Jian Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid treatment apparatus
- Patent number 11,309,194
- Issue date Apr 19, 2022
- Tokyo Electron Limited
- Koji Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, mixing method, and substrate proces...
- Patent number 11,257,692
- Issue date Feb 22, 2022
- Tokyo Electron Limited
- Kouji Ogura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,087,992
- Issue date Aug 10, 2021
- Tokyo Electron Limited
- Tsukasa Hirayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,075,096
- Issue date Jul 27, 2021
- Tokyo Electron Limited
- Takao Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method, and st...
- Patent number 10,923,368
- Issue date Feb 16, 2021
- Tokyo Electron Limited
- Takao Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 10,651,061
- Issue date May 12, 2020
- Tokyo Electron Limited
- Hiroki Ohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate liquid processing apparatus, substrate liquid processing...
- Patent number 10,643,874
- Issue date May 5, 2020
- Tokyo Electron Limited
- Hiroshi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,070,549
- Issue date Jun 30, 2015
- Tokyo Electron Limited
- Hiroshi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, MIXING METHOD, AND SUBSTRATE PROCES...
- Publication number 20220139734
- Publication date May 5, 2022
- TOKYO ELECTRON LIMITED
- Kouji Ogura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210335621
- Publication date Oct 28, 2021
- TOKYO ELECTRON LIMITED
- Tsukasa Hirayama
- B08 - CLEANING
Information Patent Application
MIXING APPARATUS, MIXING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20200289994
- Publication date Sep 17, 2020
- TOKYO ELECTRON LIMITED
- Jun Nonaka
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, MIXING METHOD, AND SUBSTRATE PROCES...
- Publication number 20200294823
- Publication date Sep 17, 2020
- TOKYO ELECTRON LIMITED
- Kouji Ogura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200251343
- Publication date Aug 6, 2020
- TOKYO ELECTRON LIMITED
- Tsukasa Hirayama
- B08 - CLEANING
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS
- Publication number 20200211865
- Publication date Jul 2, 2020
- TOKYO ELECTRON LIMITED
- Takahiko Otsu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...
- Publication number 20200152489
- Publication date May 14, 2020
- TOKYO ELECTRON LIMITED
- Takao Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20190148183
- Publication date May 16, 2019
- TOKYO ELECTRON LIMITED
- Takao Inada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20190122906
- Publication date Apr 25, 2019
- TOKYO ELECTRON LIMITED
- Jian Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20190122905
- Publication date Apr 25, 2019
- TOKYO ELECTRON LIMITED
- Hiroki Ohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20190096710
- Publication date Mar 28, 2019
- TOKYO ELECTRON LIMITED
- Hideaki Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190096711
- Publication date Mar 28, 2019
- TOKYO ELECTRON LIMITED
- Hiroki Ohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID TREATMENT APPARATUS
- Publication number 20180218924
- Publication date Aug 2, 2018
- TOKYO ELECTRON LIMITED
- Koji TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...
- Publication number 20170358470
- Publication date Dec 14, 2017
- TOKYO ELECTRON LIMITED
- Hiroshi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20100218791
- Publication date Sep 2, 2010
- TOKYO ELECTRON LIMITED
- Hiroshi Tanaka
- H01 - BASIC ELECTRIC ELEMENTS

Takao Inada

Person

Patents Grantslast 30 patents

Substrate processing apparatus, mixing method, and substrate proces...

Substrate liquid processing apparatus

Mixing apparatus, mixing method and substrate processing system

Substrate processing apparatus, substrate processing method and rec...

Substrate liquid treatment apparatus

Substrate processing apparatus, mixing method, and substrate proces...

Substrate processing method and substrate processing apparatus

Substrate processing apparatus

Substrate processing apparatus, substrate processing method, and st...

Substrate processing apparatus, substrate processing method and rec...

Substrate liquid processing apparatus, substrate liquid processing...

Substrate processing apparatus and substrate processing method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, MIXING METHOD, AND SUBSTRATE PROCES...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

MIXING APPARATUS, MIXING METHOD AND SUBSTRATE PROCESSING SYSTEM

SUBSTRATE PROCESSING APPARATUS, MIXING METHOD, AND SUBSTRATE PROCES...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE LIQUID PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE LIQUID TREATMENT APPARATUS

SUBSTRATE LIQUID PROCESSING APPARATUS, SUBSTRATE LIQUID PROCESSING...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD