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WAFER
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Publication number 20120088034
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Publication date Apr 12, 2012
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Shin-Etsu Chemical Co., Ltd.
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Toshihiko TSUKATANI
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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WAFER
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Publication number 20090142605
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Publication date Jun 4, 2009
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Shin-Etsu Chemical Co., Ltd.
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Toshihiko TSUKATANI
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H01 - BASIC ELECTRIC ELEMENTS
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WAFER
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Publication number 20090108414
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Publication date Apr 30, 2009
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Shin-Etsu Chemical Co., Ltd.
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Toshihiko TSUKATANI
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Conductive, plasma-resistant member
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Publication number 20070248832
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Publication date Oct 25, 2007
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Shin-Etsu Chemical Co., Ltd.
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Takao Maeda
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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CORROSION RESISTANT MULTILAYER MEMBER
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Publication number 20070111030
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Publication date May 17, 2007
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Shin-Etsu Chemical Co., Ltd.
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Hajime NAKANO
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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CORROSION RESISTANT MEMBER
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Publication number 20070092696
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Publication date Apr 26, 2007
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Shin-Etsu Chemical Co., Ltd.
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Toshihiko TSUKATANI
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Rare earth metal member and making method
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Publication number 20070003790
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Publication date Jan 4, 2007
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Shin-Etsu Chemical Co., Ltd.
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Toshihiko Tsukatani
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C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
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Electrostatic chuck
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Publication number 20050168908
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Publication date Aug 4, 2005
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Shin-Etsu Chemical Co., Ltd.
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Takao Maeda
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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High dielectric strength member
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Publication number 20040126625
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Publication date Jul 1, 2004
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Takao Maeda
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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