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Takao Murayama
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Chiba, JP
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last 30 patents
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Patent Grant
Method for holding substrate in vacuum
Patent number
7,905,979
Issue date
Mar 15, 2011
Hitachi Plant Technologies, Ltd.
Naoto Yokoyama
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Grant
Substrate holding device including adhesive face with hexagons defi...
Patent number
7,326,457
Issue date
Feb 5, 2008
Hitachi Plant Technologies, Ltd.
Naoto Yokoyama
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR HOLDING SUBSTRATE IN VACUUM
Publication number
20080099137
Publication date
May 1, 2008
Hitachi Plant Technologies, Ltd.
Naoto Yokoyama
G02 - OPTICS
Information
Patent Application
METHOD FOR MANUFACTURING A LIQUID CRYSTAL DISPLAY DEVICE
Publication number
20080060754
Publication date
Mar 13, 2008
Hitachi Plant Technologies, Ltd.
Naoto Yokoyama
G02 - OPTICS
Information
Patent Application
Method for holding substrate in vacuum, method for manufacturing li...
Publication number
20050167036
Publication date
Aug 4, 2005
Naoto Yokoyama
G02 - OPTICS