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Takao Omae
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Kyoto, JP
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last 30 patents
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Patent Grant
Method of and apparatus for inspecting pattern defects
Patent number
5,764,793
Issue date
Jun 9, 1998
Dainippon Screen Mfg. Co., Ltd.
Takao Omae
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method of and apparatus for inspecting the minimum annular width of...
Patent number
5,408,538
Issue date
Apr 18, 1995
Dainippon Screen Mfg. Co., Ltd.
Ryuji Kitakado
G06 - COMPUTING CALCULATING COUNTING