Takao Sugimoto

Follow

Person

Nirasaki-Shi, JP

People

Patents Applicationslast 30 patents

Information Patent Application
LOAD-LOCK APPARATUS AND SUBSTRATE COOLING METHOD
- Publication number 20100326637
- Publication date Dec 30, 2010
- TOKYO ELECTRON LIMITED
- Yoshiaki Sasaki
- H01 - BASIC ELECTRIC ELEMENTS