Takao Ukaji

Person

Tochigi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Absolute position measurement apparatus and method
- Patent number 9,043,182
- Issue date May 26, 2015
- Canon Kabushiki Kaisha
- Yuzo Seo
- G01 - MEASURING TESTING
Information Patent Grant
Wiring technique
- Patent number 7,955,938
- Issue date Jun 7, 2011
- Canon Kabushiki Kaisha
- Takao Ukaji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Vibration isolation device, arithmetic apparatus, exposure apparatu...
- Patent number 7,686,144
- Issue date Mar 30, 2010
- Canon Kabushiki Kaisha
- Takashi Shibayama
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Wiring technique
- Patent number 7,294,906
- Issue date Nov 13, 2007
- Canon Kabushiki Kaisha
- Takao Ukaji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage device and control method therefor, exposure apparatus, and d...
- Patent number 7,081,950
- Issue date Jul 25, 2006
- Canon Kabushiki Kaisha
- Takao Ukaji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Electromagnetic actuator having an armature coil surrounded by heat...
- Patent number 6,847,132
- Issue date Jan 25, 2005
- Canon Kabushiki Kaisha
- Takao Ukaji
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Stage apparatus, exposure apparatus, and device production method
- Patent number 6,654,098
- Issue date Nov 25, 2003
- Canon Kabushiki Kaisha
- Toshiya Asano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method including measur...
- Patent number 6,285,457
- Issue date Sep 4, 2001
- Canon Kabushiki Kaisha
- Takao Ukaji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate transfer system
- Patent number 5,773,953
- Issue date Jun 30, 1998
- Canon Kabushiki Kaisha
- Takao Ukaji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment method in a wafer prober
- Patent number 4,934,064
- Issue date Jun 19, 1990
- Canon Kabushiki Kaisha
- Nobuhito Yamaguchi
- G01 - MEASURING TESTING
Information Patent Grant
Wafer prober
- Patent number 4,929,893
- Issue date May 29, 1990
- Canon Kabushiki Kaisha
- Mitsuya Sato
- G01 - MEASURING TESTING
Information Patent Grant
Reject chip marking device and method of discriminating reject mark
- Patent number 4,779,981
- Issue date Oct 25, 1988
- Canon Kabushiki Kaisha
- Takao Ukaji
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ABSOLUTE POSITION MEASUREMENT APPARATUS AND METHOD
- Publication number 20100235137
- Publication date Sep 16, 2010
- Canon Kabushiki Kaisha
- Yuzo Seo
- G01 - MEASURING TESTING
Information Patent Application
Vibration Isolation Device, Arithmetic Apparatus, Exposure Apparatu...
- Publication number 20100004869
- Publication date Jan 7, 2010
- Canon Kabushiki Kaisha
- Takashi Shibayama
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
VIBRATION ISOLATION DEVICE, ARITHMETIC APPARATUS, EXPOSURE APPARATU...
- Publication number 20080246201
- Publication date Oct 9, 2008
- Canon Kabushiki Kaisha
- Takashi Shibayama
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
WIRING TECHNIQUE
- Publication number 20080030699
- Publication date Feb 7, 2008
- Canon Kabushiki Kaisha
- Takao Ukaji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Wiring technique
- Publication number 20050095818
- Publication date May 5, 2005
- Canon Kabushiki Kaisha
- Takao Ukaji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage device and control method therefor, exposure apparatus, and d...
- Publication number 20040239910
- Publication date Dec 2, 2004
- Canon Kabushiki Kaisha
- Takao Ukaji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Electromagnetic actuator and exposure apparatus including the same
- Publication number 20030011254
- Publication date Jan 16, 2003
- Canon Kabushiki Kaisha
- Takao Ukaji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage apparatus, exposure apparatus, and device production method
- Publication number 20010015799
- Publication date Aug 23, 2001
- Toshiya Asano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Takao Ukaji

Person

Patents Grantslast 30 patents

Absolute position measurement apparatus and method

Wiring technique

Vibration isolation device, arithmetic apparatus, exposure apparatu...

Wiring technique

Stage device and control method therefor, exposure apparatus, and d...

Electromagnetic actuator having an armature coil surrounded by heat...

Stage apparatus, exposure apparatus, and device production method

Exposure apparatus and device manufacturing method including measur...

Substrate transfer system

Alignment method in a wafer prober

Wafer prober

Reject chip marking device and method of discriminating reject mark

Patents Applicationslast 30 patents

ABSOLUTE POSITION MEASUREMENT APPARATUS AND METHOD

Vibration Isolation Device, Arithmetic Apparatus, Exposure Apparatu...

VIBRATION ISOLATION DEVICE, ARITHMETIC APPARATUS, EXPOSURE APPARATU...

WIRING TECHNIQUE

Wiring technique

Stage device and control method therefor, exposure apparatus, and d...

Electromagnetic actuator and exposure apparatus including the same

Stage apparatus, exposure apparatus, and device production method