Takao Yoshihara

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Joetsu, KR

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Patents Grantslast 30 patents

Information Patent Grant
Resist composition and patterning process
- Patent number 7,514,204
- Issue date Apr 7, 2009
- Shin-Etsu Chemical Co., Ltd.
- Jun Hatakeyama
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC