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Takara KATO
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Yamanashi, JP
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Patents Grants
last 30 patents
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Patent Grant
Method of forming copper wiring and method and system for forming c...
Patent number
8,859,422
Issue date
Oct 14, 2014
Tokyo Electron Limited
Tadahiro Ishizaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods of forming copper wiring and copper film, and film forming...
Patent number
8,399,353
Issue date
Mar 19, 2013
Tokyo Electron Limited
Tadahiro Ishizaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
THIN FILM FORMING METHOD
Publication number
20130252417
Publication date
Sep 26, 2013
TOKYO ELECTRON LIMITED
Tadahiro ISHIZAKA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
Publication number
20130237053
Publication date
Sep 12, 2013
TOKYO ELECTRON LIMITED
Tadahiro Ishizaka
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR FORMING Cu WIRING
Publication number
20120222782
Publication date
Sep 6, 2012
TOKYO ELECTRON LIMITED
Atsushi Gomi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING COPPER WIRING AND METHOD AND SYSTEM FOR FORMING C...
Publication number
20120196052
Publication date
Aug 2, 2012
TOKYO ELECTRON LIMITED
Tadahiro ISHIZAKA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS OF FORMING COPPER WIRING AND COPPER FILM, AND FILM FORMING...
Publication number
20120196437
Publication date
Aug 2, 2012
TOKYO ELECTRON LIMITED
Tadahiro ISHIZAKA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR FORMING CVD-RU FILM AND METHOD FOR MANUFACTURING SEMICON...
Publication number
20120064717
Publication date
Mar 15, 2012
TOKYO ELECTRON LIMITED
Takara KATO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...