Takari YAMAMOTO

Person

Miyagi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system and temperature control method
- Patent number 12,142,501
- Issue date Nov 12, 2024
- Tokyo Electron Limited
- Kenichiro Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Calibration method of infrared camera and calibration system of inf...
- Patent number 11,019,285
- Issue date May 25, 2021
- Tokyo Electron Limited
- Tomohisa Kitayama
- G01 - MEASURING TESTING
Information Patent Grant
Temperature control method
- Patent number 10,921,773
- Issue date Feb 16, 2021
- Tokyo Electron Limited
- Takari Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature measurement device, light emitting module and temperatu...
- Patent number 10,139,289
- Issue date Nov 27, 2018
- Tokyo Electron Limited
- Takari Yamamoto
- G01 - MEASURING TESTING
Information Patent Grant
Optical temperature sensor and method for manufacturing optical tem...
- Patent number 10,139,290
- Issue date Nov 27, 2018
- Tokyo Electron Limited
- Takari Yamamoto
- G01 - MEASURING TESTING
Information Patent Grant
Optical temperature sensor and method of controlling same
- Patent number 9,885,612
- Issue date Feb 6, 2018
- Tokyo Electron Limited
- Kenichiro Yamada
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250087470
- Publication date Mar 13, 2025
- TOKYO ELECTRON LIMITED
- Takari YAMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANALYSIS APPARATUS, SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSI...
- Publication number 20250013213
- Publication date Jan 9, 2025
- TOKYO ELECTRON LIMITED
- Ken HIRANO
- G05 - CONTROLLING REGULATING
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20240234113
- Publication date Jul 11, 2024
- TOKYO ELECTRON LIMITED
- Takari YAMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL METHOD
- Publication number 20240103482
- Publication date Mar 28, 2024
- TOKYO ELECTRON LIMITED
- Takari Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND TEMPERATURE CONTROL METHOD
- Publication number 20220013387
- Publication date Jan 13, 2022
- TOKYO ELECTRON LIMITED
- Kenichiro YAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROL METHOD
- Publication number 20210132575
- Publication date May 6, 2021
- TOKYO ELECTRON LIMITED
- Takari Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CALIBRATION METHOD OF INFRARED CAMERA AND CALIBRATION SYSTEM OF INF...
- Publication number 20200177825
- Publication date Jun 4, 2020
- TOKYO ELECTRON LIMITED
- Tomohisa Kitayama
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND TEMPERATURE CONTROL METHOD
- Publication number 20170372928
- Publication date Dec 28, 2017
- TOKYO ELECTRON LIMITED
- Kenichiro YAMADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE MEASUREMENT DEVICE, LIGHT EMITTING MODULE AND TEMPERATU...
- Publication number 20170176264
- Publication date Jun 22, 2017
- TOKYO ELECTRON LIMITED
- Takari YAMAMOTO
- G01 - MEASURING TESTING
Information Patent Application
TEMPERATURE SENSOR
- Publication number 20170138800
- Publication date May 18, 2017
- TOKYO ELECTRON LIMITED
- Masatoshi TABIRA
- G01 - MEASURING TESTING
Information Patent Application
TEMPERATURE CONTROL METHOD
- Publication number 20160378092
- Publication date Dec 29, 2016
- TOKYO ELECTRON LIMITED
- Takari Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL TEMPERATURE SENSOR AND METHOD FOR MANUFACTURING OPTICAL TEM...
- Publication number 20160363486
- Publication date Dec 15, 2016
- TOKYO ELECTRON LIMITED
- Takari YAMAMOTO
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL TEMPERATURE SENSOR AND METHOD OF CONTROLLING SAME
- Publication number 20160033335
- Publication date Feb 4, 2016
- TOKYO ELECTRON LIMITED
- Kenichiro YAMADA
- G01 - MEASURING TESTING

Takari YAMAMOTO

Person

Patents Grantslast 30 patents

Substrate processing system and temperature control method

Calibration method of infrared camera and calibration system of inf...

Temperature control method

Temperature measurement device, light emitting module and temperatu...

Optical temperature sensor and method for manufacturing optical tem...

Optical temperature sensor and method of controlling same

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS

ANALYSIS APPARATUS, SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSI...

PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

TEMPERATURE CONTROL METHOD

SUBSTRATE PROCESSING SYSTEM AND TEMPERATURE CONTROL METHOD

TEMPERATURE CONTROL METHOD

CALIBRATION METHOD OF INFRARED CAMERA AND CALIBRATION SYSTEM OF INF...

SUBSTRATE PROCESSING SYSTEM AND TEMPERATURE CONTROL METHOD

TEMPERATURE MEASUREMENT DEVICE, LIGHT EMITTING MODULE AND TEMPERATU...

TEMPERATURE SENSOR

TEMPERATURE CONTROL METHOD

OPTICAL TEMPERATURE SENSOR AND METHOD FOR MANUFACTURING OPTICAL TEM...

OPTICAL TEMPERATURE SENSOR AND METHOD OF CONTROLLING SAME