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Takashi Aiuchi
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Kumamoto, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus and carrier adjusting system
Patent number
8,060,244
Issue date
Nov 15, 2011
Tokyo Electron Limited
Takashi Aiuchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate inspecting device, coating/developing device and substrat...
Patent number
6,974,963
Issue date
Dec 13, 2005
Tokyo Electron Limited
Michio Tanaka
G01 - MEASURING TESTING
Information
Patent Grant
Managing system, managing method, host computer, and information co...
Patent number
6,766,209
Issue date
Jul 20, 2004
Tokyo Electron Limited
Takashi Aiuchi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Parts maintenance managing system
Patent number
6,394,670
Issue date
May 28, 2002
Tokyo Electron Limited
Kunie Ogata
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Substrate processing apparatus and carrier adjusting system
Publication number
20070293970
Publication date
Dec 20, 2007
TOKYO ELECTRON LIMITED
Takashi Aiuchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate inspecting device, coating/developing device and substrat...
Publication number
20050038618
Publication date
Feb 17, 2005
Michio Tanaka
G01 - MEASURING TESTING
Information
Patent Application
Wafer processing apparatus and transfer device adjustment system
Publication number
20040186622
Publication date
Sep 23, 2004
Takashi Aiuchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Managing system, managing method, host computer, and information co...
Publication number
20030023454
Publication date
Jan 30, 2003
TOKYO ELECTRON LIMITED
Takashi Aiuchi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Parts maintenance managing system
Publication number
20010041076
Publication date
Nov 15, 2001
TOKYO ELECTRON LIMITED
Kunie Ogata
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY