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Takashi Aramaki
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Miyagi, JP
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last 30 patents
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Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20240222090
Publication date
Jul 4, 2024
TOKYO ELECTRON LIMITED
Takashi ARAMAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SHUTTER
Publication number
20240128058
Publication date
Apr 18, 2024
TOKYO ELECTRON LIMITED
Takashi ARAMAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND GAS SUPPLY METHOD
Publication number
20230207276
Publication date
Jun 29, 2023
TOKYO ELECTRON LIMITED
Kota SHIHOMMATSU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20220301832
Publication date
Sep 22, 2022
TOKYO ELECTRON LIMITED
Takashi Aramaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20220157567
Publication date
May 19, 2022
TOKYO ELECTRON LIMITED
Lifu Li
H01 - BASIC ELECTRIC ELEMENTS