Takashi Asakawa

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Oshu-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and purging method
- Patent number 11,367,642
- Issue date Jun 21, 2022
- Tokyo Electron Limited
- Moriyoshi Kinoshita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for teaching carrier means, storage medium and substrate pro...
- Patent number 8,457,788
- Issue date Jun 4, 2013
- Tokyo Electron Limited
- Takashi Asakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for teaching carrier means, storage medium and substrate pro...
- Patent number 8,255,082
- Issue date Aug 28, 2012
- Tokyo Electron Limited
- Takashi Asakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching apparatus
- Patent number 5,772,833
- Issue date Jun 30, 1998
- Tokyo Electron Limited
- Koichiro Inazawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND PURGING METHOD
- Publication number 20200083078
- Publication date Mar 12, 2020
- TOKYO ELECTRON LIMITED
- Moriyoshi Kinoshita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR TEACHING CARRIER MEANS, STORAGE MEDIUM AND SUBSTRATE PRO...
- Publication number 20120316678
- Publication date Dec 13, 2012
- TOKYO ELECTRON LIMITED
- Takashi Asakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR TEACHING CARRIER MEANS, STORAGE MEDIUM AND SUBSTRATE PRO...
- Publication number 20090222135
- Publication date Sep 3, 2009
- TOKYO ELECTRON LIMITED
- Takashi Asakawa
- H01 - BASIC ELECTRIC ELEMENTS