Takashi CHIBA

Person

Iwate, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Deposition method
- Patent number 11,718,911
- Issue date Aug 8, 2023
- Tokyo Electron Limited
- Takashi Chiba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for dry cleaning a susceptor and substrate processing apparatus
- Patent number 11,479,852
- Issue date Oct 25, 2022
- Tokyo Electron Limited
- Jun Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition method
- Patent number 11,393,673
- Issue date Jul 19, 2022
- Tokyo Electron Limited
- Takashi Chiba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle removal method and substrate processing method
- Patent number 10,668,512
- Issue date Jun 2, 2020
- Tokyo Electron Limited
- Jun Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition apparatus
- Patent number 10,151,028
- Issue date Dec 11, 2018
- Tokyo Electron Limited
- Takashi Chiba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a silicon oxide film
- Patent number 9,293,321
- Issue date Mar 22, 2016
- Tokyo Electron Limited
- Tatsuya Tamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Removal of metal contaminant deposited on quartz member of vertical...
- Patent number 8,298,341
- Issue date Oct 30, 2012
- Tokyo Electron Limited
- Hitoshi Katoh
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Method for removing silicon oxide film and processing apparatus
- Patent number 7,611,995
- Issue date Nov 3, 2009
- Tokyo Electron Limited
- Kazuhide Hasebe
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FILM-FORMING METHOD AND FILM-FORMING APPARATUS
- Publication number 20250037991
- Publication date Jan 30, 2025
- TOKYO ELECTRON LIMITED
- Takashi CHIBA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING METHOD AND FILM-FORMING APPARATUS
- Publication number 20250034699
- Publication date Jan 30, 2025
- TOKYO ELECTRON LIMITED
- Takashi CHIBA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230402256
- Publication date Dec 14, 2023
- TOKYO ELECTRON LIMITED
- Takashi CHIBA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION METHOD AND DEPOSITION APPARATUS
- Publication number 20230094328
- Publication date Mar 30, 2023
- TOKYO ELECTRON LIMITED
- Takashi CHIBA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION METHOD
- Publication number 20200370178
- Publication date Nov 26, 2020
- TOKYO ELECTRON LIMITED
- Takashi CHIBA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION METHOD
- Publication number 20200373156
- Publication date Nov 26, 2020
- TOKYO ELECTRON LIMITED
- Takashi CHIBA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DRY CLEANING A SUSCEPTOR AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20190360092
- Publication date Nov 28, 2019
- TOKYO ELECTRON LIMITED
- Jun SATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20190284691
- Publication date Sep 19, 2019
- TOKYO ELECTRON LIMITED
- Shigehiro MIURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA GENERATION METHOD, PLASMA PROCESSING METHOD USING THE SAME A...
- Publication number 20180277338
- Publication date Sep 27, 2018
- TOKYO ELECTRON LIMITED
- Takehiro FUKADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE REMOVAL METHOD AND SUBSTRATE PROCESSING METHOD
- Publication number 20180169716
- Publication date Jun 21, 2018
- TOKYO ELECTRON LIMITED
- Jun SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM DEPOSITION APPARATUS
- Publication number 20150345015
- Publication date Dec 3, 2015
- TOKYO ELECTRON LIMITED
- Takashi CHIBA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING A SILICON OXIDE FILM
- Publication number 20150079808
- Publication date Mar 19, 2015
- TOKYO ELECTRON LIMITED
- Tatsuya TAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REMOVAL OF METAL CONTAMINANT DEPOSITED ON QUARTZ MEMBER OF VERTICAL...
- Publication number 20090293908
- Publication date Dec 3, 2009
- TOKYO ELECTRON LIMITED
- Hitoshi KATOH
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
Method for cleaning heat treatment apparatus
- Publication number 20060216949
- Publication date Sep 28, 2006
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for cleaning thin-film forming apparatus
- Publication number 20060213539
- Publication date Sep 28, 2006
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for removing silicon oxide film and processing apparatus
- Publication number 20060216941
- Publication date Sep 28, 2006
- Kazuhide Hasebe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal processing unit and thermal processing method
- Publication number 20050136693
- Publication date Jun 23, 2005
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Takashi CHIBA

Person

Patents Grantslast 30 patents

Deposition method

Method for dry cleaning a susceptor and substrate processing apparatus

Deposition method

Particle removal method and substrate processing method

Film deposition apparatus

Method of manufacturing a silicon oxide film

Removal of metal contaminant deposited on quartz member of vertical...

Method for removing silicon oxide film and processing apparatus

Patents Applicationslast 30 patents

FILM-FORMING METHOD AND FILM-FORMING APPARATUS

FILM-FORMING METHOD AND FILM-FORMING APPARATUS

PLASMA PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

DEPOSITION METHOD AND DEPOSITION APPARATUS

DEPOSITION METHOD

DEPOSITION METHOD

METHOD FOR DRY CLEANING A SUSCEPTOR AND SUBSTRATE PROCESSING APPARATUS

FILM FORMING METHOD AND FILM FORMING APPARATUS

PLASMA GENERATION METHOD, PLASMA PROCESSING METHOD USING THE SAME A...

PARTICLE REMOVAL METHOD AND SUBSTRATE PROCESSING METHOD

FILM DEPOSITION APPARATUS

METHOD OF MANUFACTURING A SILICON OXIDE FILM

REMOVAL OF METAL CONTAMINANT DEPOSITED ON QUARTZ MEMBER OF VERTICAL...

Method for cleaning heat treatment apparatus

Method for cleaning thin-film forming apparatus

Method for removing silicon oxide film and processing apparatus

Thermal processing unit and thermal processing method