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Takashi Enomoto
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Nirasaki-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Seasoning method and etching method
Patent number
10,950,452
Issue date
Mar 16, 2021
Tokyo Electron Limited
Yoshio Ishikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method of plasma discharge ignition to reduce surface pa...
Patent number
10,818,502
Issue date
Oct 27, 2020
Tokyo Electron Limited
Sergey Voronin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for ESC charge control for wafer clamping
Patent number
9,530,626
Issue date
Dec 27, 2016
Tokyo Electron Limited
Jason Marion
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dry etching method
Patent number
7,179,752
Issue date
Feb 20, 2007
Tokyo Electron Limited
Akitaka Shimizu
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF PLASMA DISCHARGE IGNITION TO REDUCE SURFACE PARTICLES
Publication number
20180144946
Publication date
May 24, 2018
TOKYO ELECTRON LIMITED
Sergey Voronin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEASONING METHOD AND ETCHING METHOD
Publication number
20170062227
Publication date
Mar 2, 2017
TOKYO ELECTRON LIMITED
Yoshio Ishikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR ESC CHARGE CONTROL FOR WAFER CLAMPING
Publication number
20160027620
Publication date
Jan 28, 2016
TOKYO ELECTRON LIMITED
Jason MARION
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Dry etching method
Publication number
20040214445
Publication date
Oct 28, 2004
Akitaka Shimizu
H01 - BASIC ELECTRIC ELEMENTS