Takashi Enomoto

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Nirasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Seasoning method and etching method
- Patent number 10,950,452
- Issue date Mar 16, 2021
- Tokyo Electron Limited
- Yoshio Ishikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method of plasma discharge ignition to reduce surface pa...
- Patent number 10,818,502
- Issue date Oct 27, 2020
- Tokyo Electron Limited
- Sergey Voronin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for ESC charge control for wafer clamping
- Patent number 9,530,626
- Issue date Dec 27, 2016
- Tokyo Electron Limited
- Jason Marion
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry etching method
- Patent number 7,179,752
- Issue date Feb 20, 2007
- Tokyo Electron Limited
- Akitaka Shimizu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF PLASMA DISCHARGE IGNITION TO REDUCE SURFACE PARTICLES
- Publication number 20180144946
- Publication date May 24, 2018
- TOKYO ELECTRON LIMITED
- Sergey Voronin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEASONING METHOD AND ETCHING METHOD
- Publication number 20170062227
- Publication date Mar 2, 2017
- TOKYO ELECTRON LIMITED
- Yoshio Ishikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR ESC CHARGE CONTROL FOR WAFER CLAMPING
- Publication number 20160027620
- Publication date Jan 28, 2016
- TOKYO ELECTRON LIMITED
- Jason MARION
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dry etching method
- Publication number 20040214445
- Publication date Oct 28, 2004
- Akitaka Shimizu
- H01 - BASIC ELECTRIC ELEMENTS