Takashi Furukawa

Person

Sagamihara, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Defective product inspection apparatus, probe positioning method an...
- Patent number 8,074,293
- Issue date Dec 6, 2011
- Hitachi High-Technologies Corporation
- Eiichi Hazaki
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus
- Patent number 7,714,288
- Issue date May 11, 2010
- Hitachi High-Technologies Corporation
- Tasuku Yano
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor wafer inspection apparatus
- Patent number 7,633,303
- Issue date Dec 15, 2009
- Hitachi High-Technologies Corporation
- Takashi Furukawa
- G01 - MEASURING TESTING
Information Patent Grant
Probe navigation method and device and defect inspection device
- Patent number 7,598,755
- Issue date Oct 6, 2009
- Hitachi High-Technologies Corporation
- Takashi Furukawa
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus
- Patent number 7,582,885
- Issue date Sep 1, 2009
- Hitachi High-Technologies Corp.
- Souichi Katagiri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Defective product inspection apparatus, probe positioning method an...
- Patent number 7,553,334
- Issue date Jun 30, 2009
- Hitachi High-Technologies Corporation
- Eiichi Hazaki
- G01 - MEASURING TESTING
Information Patent Grant
Probe navigation method and device and defect inspection device
- Patent number 7,372,283
- Issue date May 13, 2008
- Hitachi High-Technologies Corporation
- Takashi Furukawa
- G01 - MEASURING TESTING
Information Patent Grant
Defective product inspection apparatus, probe positioning method an...
- Patent number 7,297,945
- Issue date Nov 20, 2007
- Hitachi High-Technologies Corporation
- Eiichi Hazaki
- G01 - MEASURING TESTING
Information Patent Grant
Probe navigation method and device and defect inspection device
- Patent number 7,071,713
- Issue date Jul 4, 2006
- Hitachi High-Technologies Corpoartion
- Takashi Furukawa
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
DEFECTIVE PRODUCT INSPECTION APPARATUS, PROBE POSITIONING METHOD AN...
- Publication number 20090230984
- Publication date Sep 17, 2009
- Hitachi High-Technologies Corporation
- Eiichi Hazaki
- G01 - MEASURING TESTING
Information Patent Application
Charged particle beam apparatus
- Publication number 20080277583
- Publication date Nov 13, 2008
- Hitachi High-Technologies Corporation
- Tasuku Yano
- G01 - MEASURING TESTING
Information Patent Application
SEMICONDUCTOR WAFER INSPECTION APPARATUS
- Publication number 20080246497
- Publication date Oct 9, 2008
- Takashi Furukawa
- G01 - MEASURING TESTING
Information Patent Application
PROBE NAVIGATION METHOD AND DEVICE AND DEFECT INSPECTION DEVICE
- Publication number 20080218185
- Publication date Sep 11, 2008
- Takashi Furukawa
- G01 - MEASURING TESTING
Information Patent Application
Defective product inspection apparatus, probe positioning method an...
- Publication number 20080048699
- Publication date Feb 28, 2008
- Hitachi High-Technologies Corporation
- Eiichi Hazaki
- G01 - MEASURING TESTING
Information Patent Application
Charged particle beam apparatus
- Publication number 20060231773
- Publication date Oct 19, 2006
- Souichi Katagiri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Probe navigation method and device and defect inspection device
- Publication number 20060192574
- Publication date Aug 31, 2006
- Takashi Furukawa
- G01 - MEASURING TESTING
Information Patent Application
Probe navigation method and device and defect inspection device
- Publication number 20050140379
- Publication date Jun 30, 2005
- Takashi Furukawa
- G01 - MEASURING TESTING
Information Patent Application
Defective product inspection apparatus, probe positioning method an...
- Publication number 20050139781
- Publication date Jun 30, 2005
- Eiichi Hazaki
- G01 - MEASURING TESTING

Takashi Furukawa

Person

Patents Grantslast 30 patents

Defective product inspection apparatus, probe positioning method an...

Charged particle beam apparatus

Semiconductor wafer inspection apparatus

Probe navigation method and device and defect inspection device

Charged particle beam apparatus

Defective product inspection apparatus, probe positioning method an...

Probe navigation method and device and defect inspection device

Defective product inspection apparatus, probe positioning method an...

Probe navigation method and device and defect inspection device

Patents Applicationslast 30 patents

DEFECTIVE PRODUCT INSPECTION APPARATUS, PROBE POSITIONING METHOD AN...

Charged particle beam apparatus

SEMICONDUCTOR WAFER INSPECTION APPARATUS

PROBE NAVIGATION METHOD AND DEVICE AND DEFECT INSPECTION DEVICE

Defective product inspection apparatus, probe positioning method an...

Charged particle beam apparatus

Probe navigation method and device and defect inspection device

Probe navigation method and device and defect inspection device

Defective product inspection apparatus, probe positioning method an...