Takashi Fuse

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Substrate cleaning apparatus and substrate cleaning method
- Patent number 9,099,298
- Issue date Aug 4, 2015
- Tokyo Electron Limited
- Kazuya Dobashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20130008470
- Publication date Jan 10, 2013
- IWATANI CORPORATION
- Kazuya DOBASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RESIST REMOVAL APPARATUS AND RESIST REMOVAL METHOD
- Publication number 20120312334
- Publication date Dec 13, 2012
- IWATANI CORPORATION
- Kazuya DOBASHI
- H01 - BASIC ELECTRIC ELEMENTS