Takashi HAYAKAWA

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Utsunomiya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus, stage apparatus, and device fabrication method...
- Patent number 9,632,432
- Issue date Apr 25, 2017
- Canon Kabushiki Kaisha
- Takashi Hayakawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EXPOSING APPARATUS AND METHOD FOR MANUFACTURING ARTICLE
- Publication number 20220035260
- Publication date Feb 3, 2022
- Canon Kabushiki Kaisha
- Takashi Hayakawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, STAGE APPARATUS, AND DEVICE FABRICATION METHOD
- Publication number 20140285791
- Publication date Sep 25, 2014
- Canon Kabushiki Kaisha
- Takashi HAYAKAWA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY