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Takashi Higuchi
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Kyoto-shi, JP
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last 30 patents
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Patent Application
Wafer cleaning method and equipment
Publication number
20080202559
Publication date
Aug 28, 2008
Kabushiki Kaisha Toshiba Dainippon Screen Mfg.Co., Ltd.
Kunihiro Miyazaki
G01 - MEASURING TESTING
Information
Patent Application
Semiconductor manufacturing apparatus and chemical exchanging method
Publication number
20060042756
Publication date
Mar 2, 2006
Kunihiro Miyazaki
B08 - CLEANING
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Patent Application
Wafer cleaning method and equipment
Publication number
20050081886
Publication date
Apr 21, 2005
Kunihiro Miyazaki
G01 - MEASURING TESTING