Takashi Hiroi

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Defect inspection apparatus and defect inspection program
- Patent number 12,112,963
- Issue date Oct 8, 2024
- HITACHI HIGH-TECH CORPORATION
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect inspection method and defect inspection device
- Patent number 12,039,716
- Issue date Jul 16, 2024
- HITACHI HIGH-TECH CORPORATION
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect inspection device and defect inspection method
- Patent number 11,788,973
- Issue date Oct 17, 2023
- HITACHI HIGH-TECH CORPORATION
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Inspection information generation device, inspection information ge...
- Patent number 11,041,815
- Issue date Jun 22, 2021
- HITACHI HIGH-TECH CORPORATION
- Takahiro Urano
- G01 - MEASURING TESTING
Information Patent Grant
Pattern inspecting and measuring device and program
- Patent number 9,858,659
- Issue date Jan 2, 2018
- Hitachi High-Technologies Corporation
- Tsuyoshi Minakawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern inspection device and pattern inspection method
- Patent number 9,188,554
- Issue date Nov 17, 2015
- Hitachi High-Technologies Corporation
- Chie Shishido
- G01 - MEASURING TESTING
Information Patent Grant
Defect inspection method and defect inspection apparatus
- Patent number 8,953,868
- Issue date Feb 10, 2015
- Hitachi High-Technologies Corporation
- Shinya Murakami
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect inspection method, and device thereof
- Patent number 8,853,628
- Issue date Oct 7, 2014
- Hitachi High-Technologies Corporation
- Naoki Hosoya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Circuit-pattern inspection device
- Patent number 8,658,987
- Issue date Feb 25, 2014
- Hitachi High-Technologies Corporation
- Takuma Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Circuit pattern examining apparatus and circuit pattern examining m...
- Patent number 8,509,516
- Issue date Aug 13, 2013
- Hitachi High-Technologies Corporation
- Takashi Hiroi
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam device for scanning a sample using a charged...
- Patent number 8,421,010
- Issue date Apr 16, 2013
- Hitachi High-Technologies Corporation
- Takashi Hiroi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam exposure or system inspection or measurement apparatu...
- Patent number 8,212,227
- Issue date Jul 3, 2012
- Hitachi, Ltd.
- Masahiro Watanabe
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Inspection apparatus and an inspection method for inspecting a circ...
- Patent number 8,121,395
- Issue date Feb 21, 2012
- Hitachi High-Technologies Corporation
- Takashi Hiroi
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting defects of circuit patterns
- Patent number 8,111,902
- Issue date Feb 7, 2012
- Hitachi High-Technologies Corporation
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern inspection method and apparatus
- Patent number 7,957,579
- Issue date Jun 7, 2011
- Hitachi, Ltd.
- Takashi Hiroi
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting integrated circuit pattern
- Patent number 7,952,074
- Issue date May 31, 2011
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Pattern inspection method and apparatus
- Patent number 7,894,658
- Issue date Feb 22, 2011
- Hitachi, Ltd.
- Takashi Hiroi
- G01 - MEASURING TESTING
Information Patent Grant
Image processing unit for wafer inspection tool
- Patent number 7,889,911
- Issue date Feb 15, 2011
- Hitachi High-Technologies Corporation
- Michio Nakano
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Semiconductor wafer inspection tool and semiconductor wafer inspect...
- Patent number 7,728,294
- Issue date Jun 1, 2010
- Hitachi High-Technologies Corporation
- Takashi Hiroi
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam exposure or system inspection or measurement apparatu...
- Patent number 7,692,144
- Issue date Apr 6, 2010
- Hitachi, Ltd.
- Masahiro Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of classifying defects using multiple inspection machines
- Patent number 7,602,962
- Issue date Oct 13, 2009
- Hitachi High-Technologies Corporation
- Atsushi Miyamoto
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Circuit-pattern inspection apparatus
- Patent number 7,532,328
- Issue date May 12, 2009
- Hitachi High-Technologies Corporation
- Yasuhiko Nara
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for inspecting pattern defects and mirror elec...
- Patent number 7,521,676
- Issue date Apr 21, 2009
- Hitachi High-Technologies Corporation
- Hirohito Okuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern inspection method and apparatus
- Patent number 7,457,453
- Issue date Nov 25, 2008
- Hitachi, Ltd.
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern inspection method and apparatus using electron beam
- Patent number 7,439,504
- Issue date Oct 21, 2008
- Hitachi, Ltd.
- Takashi Hiroi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image processing unit for wafer inspection tool
- Patent number 7,421,110
- Issue date Sep 2, 2008
- Hitachi High-Technologies Corporation
- Michio Nakano
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus and method for electron beam inspection with projection e...
- Patent number 7,420,167
- Issue date Sep 2, 2008
- Hitachi High-Technologies Corporation
- Hirohito Okuda
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting integrated circuit pattern
- Patent number 7,417,444
- Issue date Aug 26, 2008
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus and method with surface height calculator a...
- Patent number 7,329,889
- Issue date Feb 12, 2008
- Hitachi, Ltd.
- Masahiro Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Circuit-pattern inspection apparatus
- Patent number 7,292,327
- Issue date Nov 6, 2007
- Hitachi High-Technologies Corporation
- Yasuhiko Nara
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
Defect Inspection Method and Defect Inspection Device
- Publication number 20220301136
- Publication date Sep 22, 2022
- Takashi HIROI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Defect Inspection Apparatus and Defect Inspection Program
- Publication number 20220084856
- Publication date Mar 17, 2022
- Hitachi High-Tech Corporation
- Takashi HIROI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Defect Inspection Device and Defect Inspection Method
- Publication number 20210381989
- Publication date Dec 9, 2021
- Hitachi High-Tech Corporation
- Takashi HIROI
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION INFORMATION GENERATION DEVICE, INSPECTION INFORMATION GE...
- Publication number 20190154593
- Publication date May 23, 2019
- Hitachi High-Technologies Corporation
- Takahiro URANO
- G01 - MEASURING TESTING
Information Patent Application
Pattern Inspecting and Measuring Device and Program
- Publication number 20150228063
- Publication date Aug 13, 2015
- Hitachi High-Technologies Corporation
- Tsuyoshi Minakawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN INSPECTION DEVICE AND PATTERN INSPECTION METHOD
- Publication number 20150212019
- Publication date Jul 30, 2015
- Hitachi High-Technologies Corporation
- Chie Shishido
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTION METHOD AND DEFECT INSPECTION APPARATUS
- Publication number 20130322737
- Publication date Dec 5, 2013
- Hitachi High-Technologies Corporation
- Shinya MURAKAMI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CIRCUIT PATTERN INSPECTING DEVICE AND INSPECTING METHOD THEREOF
- Publication number 20130271595
- Publication date Oct 17, 2013
- Hitachi High-Technologies Corporation
- Takashi Hiroi
- G01 - MEASURING TESTING
Information Patent Application
DEFECT INSPECTING APPARATUS
- Publication number 20130248709
- Publication date Sep 26, 2013
- Hitachi High-Technologies Corporation
- Takuma Yamamoto
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT INSPECTION METHOD, AND DEVICE THEREOF
- Publication number 20130119250
- Publication date May 16, 2013
- Naoki Hosoya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CIRCUIT PATTERN INSPECTION APPARATUS AND CIRCUIT PATTERN INSPECTION...
- Publication number 20130082177
- Publication date Apr 4, 2013
- Hitachi High-Technologies Corporation
- Takashi Hiroi
- G01 - MEASURING TESTING
Information Patent Application
IMAGE GENERATING METHOD AND DEVICE USING SCANNING CHARGED PARTICLE...
- Publication number 20130010100
- Publication date Jan 10, 2013
- Go Kotaki
- G01 - MEASURING TESTING
Information Patent Application
Circuit-Pattern Inspection Device
- Publication number 20120305768
- Publication date Dec 6, 2012
- Hitachi High-Technologies Corporation
- Takuma Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD
- Publication number 20120045115
- Publication date Feb 23, 2012
- Shuangqi Dong
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN INSPECTING APPARATUS AND PATTERN INSPECTING METHOD
- Publication number 20110298915
- Publication date Dec 8, 2011
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND DEVICE FOR DEFECT INSPECTION
- Publication number 20110188735
- Publication date Aug 4, 2011
- Naoki Hosoya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20110163230
- Publication date Jul 7, 2011
- Hitachi High-Technologies Corporation
- Takashi Hiroi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CIRCUIT PATTERN EXAMINING APPARATUS AND CIRCUIT PATTERN EXAMINING M...
- Publication number 20110129141
- Publication date Jun 2, 2011
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Pattern Inspection Method And Apparatus
- Publication number 20100246933
- Publication date Sep 30, 2010
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Electron Beam Exposure Or System Inspection Or Measurement Apparatu...
- Publication number 20100193686
- Publication date Aug 5, 2010
- Masahiro Watanabe
- B82 - NANO-TECHNOLOGY
Information Patent Application
APPARATUS FOR INSPECTING A SUBSTRATE, A METHOD OF INSPECTING A SUBS...
- Publication number 20090309022
- Publication date Dec 17, 2009
- Hitachi High-Technologies Corporation
- Yasuhiro GUNJI
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION APPARATUS AND AN INSPECTION METHOD FOR INSPECTING A CIRC...
- Publication number 20090226075
- Publication date Sep 10, 2009
- Hitachi High-Technologies Corporation
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR INSPECTING INTEGRATED CIRCUIT PATTERN
- Publication number 20080302964
- Publication date Dec 11, 2008
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Application
IMAGE PROCESSING UNIT FOR WAFER INSPECTION TOOL
- Publication number 20080285841
- Publication date Nov 20, 2008
- Michio Nakano
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Circuit-pattern inspection apparatus
- Publication number 20080174772
- Publication date Jul 24, 2008
- Hitachi, Ltd
- Yasuhiko Nara
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Inspection apparatus and an inspection method
- Publication number 20080099675
- Publication date May 1, 2008
- Hitachi High-Technologies Corporation
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Electron Beam Exposure or System Inspection Or Measurement Apparatu...
- Publication number 20080078933
- Publication date Apr 3, 2008
- Masahiro Watanabe
- B82 - NANO-TECHNOLOGY
Information Patent Application
Semiconductor wafer inspection tool and semiconductor wafer inspect...
- Publication number 20080067381
- Publication date Mar 20, 2008
- Hitachi High-Technologies Corporation
- Takashi Hiroi
- G01 - MEASURING TESTING
Information Patent Application
Pattern Inspection Method And Apparatus
- Publication number 20080063257
- Publication date Mar 13, 2008
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Pattern Inspection Method And Apparatus
- Publication number 20080056559
- Publication date Mar 6, 2008
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING

Takashi Hiroi

Person

Patents Grantslast 30 patents

Defect inspection apparatus and defect inspection program

Defect inspection method and defect inspection device

Defect inspection device and defect inspection method

Inspection information generation device, inspection information ge...

Pattern inspecting and measuring device and program

Pattern inspection device and pattern inspection method

Defect inspection method and defect inspection apparatus

Defect inspection method, and device thereof

Circuit-pattern inspection device

Circuit pattern examining apparatus and circuit pattern examining m...

Charged particle beam device for scanning a sample using a charged...

Electron beam exposure or system inspection or measurement apparatu...

Inspection apparatus and an inspection method for inspecting a circ...

Method and apparatus for inspecting defects of circuit patterns

Pattern inspection method and apparatus

Method and apparatus for inspecting integrated circuit pattern

Pattern inspection method and apparatus

Image processing unit for wafer inspection tool

Semiconductor wafer inspection tool and semiconductor wafer inspect...

Electron beam exposure or system inspection or measurement apparatu...

Method of classifying defects using multiple inspection machines

Circuit-pattern inspection apparatus

Method and apparatus for inspecting pattern defects and mirror elec...

Pattern inspection method and apparatus

Pattern inspection method and apparatus using electron beam

Image processing unit for wafer inspection tool

Apparatus and method for electron beam inspection with projection e...

Method and apparatus for inspecting integrated circuit pattern

Electron beam apparatus and method with surface height calculator a...

Circuit-pattern inspection apparatus

Patents Applicationslast 30 patents

Defect Inspection Method and Defect Inspection Device

Defect Inspection Apparatus and Defect Inspection Program

Defect Inspection Device and Defect Inspection Method

INSPECTION INFORMATION GENERATION DEVICE, INSPECTION INFORMATION GE...

Pattern Inspecting and Measuring Device and Program

PATTERN INSPECTION DEVICE AND PATTERN INSPECTION METHOD

DEFECT INSPECTION METHOD AND DEFECT INSPECTION APPARATUS

CIRCUIT PATTERN INSPECTING DEVICE AND INSPECTING METHOD THEREOF

DEFECT INSPECTING APPARATUS

DEFECT INSPECTION METHOD, AND DEVICE THEREOF

CIRCUIT PATTERN INSPECTION APPARATUS AND CIRCUIT PATTERN INSPECTION...

IMAGE GENERATING METHOD AND DEVICE USING SCANNING CHARGED PARTICLE...

Circuit-Pattern Inspection Device

DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD

PATTERN INSPECTING APPARATUS AND PATTERN INSPECTING METHOD

METHOD AND DEVICE FOR DEFECT INSPECTION

CHARGED PARTICLE BEAM DEVICE

CIRCUIT PATTERN EXAMINING APPARATUS AND CIRCUIT PATTERN EXAMINING M...

Pattern Inspection Method And Apparatus

Electron Beam Exposure Or System Inspection Or Measurement Apparatu...

APPARATUS FOR INSPECTING A SUBSTRATE, A METHOD OF INSPECTING A SUBS...

INSPECTION APPARATUS AND AN INSPECTION METHOD FOR INSPECTING A CIRC...

METHOD AND APPARATUS FOR INSPECTING INTEGRATED CIRCUIT PATTERN

IMAGE PROCESSING UNIT FOR WAFER INSPECTION TOOL

Circuit-pattern inspection apparatus

Inspection apparatus and an inspection method

Electron Beam Exposure or System Inspection Or Measurement Apparatu...

Semiconductor wafer inspection tool and semiconductor wafer inspect...

Pattern Inspection Method And Apparatus

Pattern Inspection Method And Apparatus